Real-Time and Meter-Scale Absolute Distance Measurement by Frequency-Comb-Referenced Multi-Wavelength Interferometry

被引:5
|
作者
Wang, Guochao [1 ,2 ]
Tan, Lilong [1 ]
Yan, Shuhua [2 ]
机构
[1] High Tech Inst Xian, Xian 710025, Shaanxi, Peoples R China
[2] Natl Univ Def Technol, Coll Mechatron Engn & Automat, Changsha 410073, Hunan, Peoples R China
来源
SENSORS | 2018年 / 18卷 / 02期
基金
中国国家自然科学基金;
关键词
absolute distance measurement; frequency comb; multi-wavelength interferometry; direct synthetic wavelength interferometry; non-ambiguous range; FEMTOSECOND PULSE LASER; LONG; RESOLUTION; METROLOGY; AIR;
D O I
10.3390/s18020500
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
We report on a frequency-comb-referenced absolute interferometer which instantly measures long distance by integrating multi-wavelength interferometry with direct synthetic wavelength interferometry. The reported interferometer utilizes four different wavelengths, simultaneously calibrated to the frequency comb of a femtosecond laser, to implement subwavelength distance measurement, while direct synthetic wavelength interferometry is elaborately introduced by launching a fifth wavelength to extend a non-ambiguous range for meter-scale measurement. A linearity test performed comparatively with a He-Ne laser interferometer shows a residual error of less than 70.8 nm in peak-to-valley over a 3 m distance, and a 10 h distance comparison is demonstrated to gain fractional deviations of similar to 3 x 10(-8) versus 3 m distance. Test results reveal that the presented absolute interferometer enables precise, stable, and long-term distance measurements and facilitates absolute positioning applications such as large-scale manufacturing and space missions.
引用
收藏
页数:13
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