Effect of substrate on microstructure and mechanical properties of sol-gel prepared (K, Na)NbO3 thin films

被引：21

作者：

Brunckova, H. ^{[1
]}

Medvecky, L. ^{[1
]}

Hvizdos, P. ^{[1
]}

机构：

[1] Slovak Acad Sci, Inst Mat Res, Kosice 04001, Slovakia

来源：

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2013年 / 178卷 / 04期

关键词：

Thin films; Sol-gel processes; Perovskites; Microstructure; Mechanical properties; ELASTIC-MODULUS; PHASE-TRANSITIONS; LOW-TEMPERATURE; NANOINDENTATION; HARDNESS; MULTILAYERS; MORPHOLOGY; ISSUES; KNBO3; LOAD;

D O I：

10.1016/j.mseb.2012.12.003

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Lead-free ferroelectric (K, Na)NbO3 (KNN) thin films (similar to 200 nm thickness) were prepared using a modified sol-gel method by mixing K and Na acetates with the Nb-tartarate complex, deposited by spin-coating method on Pt/Al2O3 and Pt/SiO2/Si substrates and sintered at 650 degrees C. Pure perovskite phase of K0.65Na0.35NbO3 in film on silicon were revealed, while film on alumina contained also small amount of secondary pyrochlore Na2Nb8O21 phase. Homogenous microstructure of film on Si substrate was smoother with the lower roughness (similar to 7.4 nm) and contained spherical (similar to 50 nm) particles. The mechanical properties of films were characterized by nanoindentation. The modulus and hardness of KNN films were calculated from their composite values of film/substrate systems using discontinuous and modified Bhattacharya model, respectively. The KNN film modulus was higher on alumina substrate (91 GPa) in comparison with silicon substrate (71 GPa) and values of film hardness were the same (4.5 GPa) on both substrates. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：254 / 262

页数：9

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