Control of vacuum arc source cathode spots contraction motion by changing electromagnetic field

被引:12
作者
Song, Xin [1 ]
Wang, Qing [1 ]
Lin, Zeng [1 ]
Zhang, Puhui [1 ]
Wang, Shuhao [1 ]
机构
[1] Northeastern Univ, Sch Mech Engn & Automat, Shenyang 110004, Liaoning, Peoples R China
关键词
magnetic field component; cathode spots motion; velocity; drift; zero line; PARTIAL-PRESSURE; MAGNETIC-FIELD; MACROPARTICLES; SUBSTRATE; REDUCTION; DYNAMICS;
D O I
10.1088/2058-6272/aa8a30
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
This paper investigates the magnetic field component impact on cathode spots motion trajectory and the mechanism of periodic contraction. Electromagnetic coils and permanent magnets were installed at the different sides of cathode surface, the photographs of cathode spots motion trajectory were captured by a camera. Increasing the number of magnets and decreasing the distance between magnets and cathode both lead to enhancing cathode spots motion velocity. Radii of cathode spots trajectory decrease gradually with the increasing of electromagnetic coil's current, from 40 mm at 0 A to 10 mm at 2.7 A. Parallel magnetic field component intensity influence the speed of cathode spots rotate motion, and perpendicular magnetic field component drives spots drift in the radial direction. Cathode spot's radial drift is controlled by changing the location of the 'zero line' where perpendicular magnetic component shifts direction and the radius of cathode spots trajectory almost equal to 'zero line'.
引用
收藏
页数:7
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