Stroboscopic supercontinuum white-light interferometer for MEMS characterization

被引：17

作者：

Hanhijarvi, K. ^{[1
]}

Kassamakov, I. ^{[1
,2
]}

Heikkinen, V. ^{[1
]}

Aaltonen, J. ^{[2
]}

Sainiemi, L. ^{[3
]}

Grigoras, K. ^{[3
]}

Franssila, S. ^{[3
]}

Haeggstrom, E. ^{[1
]}

机构：

[1] Univ Helsinki, Dept Phys, FIN-00014 Helsinki, Finland

[2] Aalto Univ, Univ Helsinki, Helsinki Inst Phys, FIN-00014 Helsinki, Finland

[3] Aalto Univ, Dept Mat Sci & Engn, FIN-00076 Aalto, Finland

来源：

OPTICS LETTERS | 2012年 / 37卷 / 10期

基金：

芬兰科学院;

关键词：

RESOLUTION;

D O I：

10.1364/OL.37.001703

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400 x 25 x 4 mu m(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42 +/- 0.03 mu m (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices. (C) 2012 Optical Society of America

引用

页码：1703 / 1705

页数：3

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