Low-Voltage Switchable Microplasma Arrays Generated Using Microwave Resonators

被引：14

作者：

Hoskinson, Alan R. ^{[1
]}

Singh, Pramod K. ^{[1
]}

Sonkusale, Sameer ^{[1
]}

Hopwood, Jeffrey ^{[1
]}

机构：

[1] Tufts Univ, Dept Elect & Comp Engn, Medford, MA 02155 USA

来源：

IEEE ELECTRON DEVICE LETTERS | 2013年 / 34卷 / 06期

关键词：

Atmospheric-pressure plasmas; microwave integrated circuits; plasma devices; unconventional circuits;

D O I：

10.1109/LED.2013.2257659

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microplasmas are generated at atmospheric pressure using an array of microstrip resonators and controlled by diode switches. These microplasmas are sustained by continuous microwave power, but can be individually switched on and off by applying +2/ -5 VDC to the diodes. Each diode allows the capacitance between the resonator and reference electrode to be switched in or out of the circuit, shifting the resonant frequency and modulating power delivered to the microplasma. We present models of the resonator circuit including plasma loading and demonstrate the circuit's efficacy for the addressable control of microplasmas in a five-resonator array.

引用

页码：804 / 806

页数：3

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