共 25 条
[23]
Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester
[J].
15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015),
2015, 660
[24]
Low temperature aluminum nitride thin films for sensory applications
[J].
AIP ADVANCES,
2016, 6 (07)