Effect of spiral-like islands on structural quality, optical and electrical performance of InGaN/GaN heterostructures grown by metal organic chemical vapour deposition

被引:5
|
作者
Prabakaran, K. [1 ,2 ]
Ramesh, R. [3 ]
Arivazhagan, P. [4 ]
Jayasakthi, M. [5 ]
Sanjay, S. [6 ]
Surender, S. [7 ]
Jacob, I. Davis [8 ]
Balaji, M. [9 ]
Baskar, K. [2 ]
机构
[1] Saiva Bhanu Kshatriya Coll, Dept Phys, Aruppukottai 626 101, Tamil Nadu, India
[2] Anna Univ, Crystal Growth Ctr, Chennai 600025, Tamilnadu, India
[3] Aalto Univ, Dept Elect & Nanoengn, POB 13500, FI-00076 Aalto, Finland
[4] Indian Inst Technol, Nanofunct Mat Technol Ctr NFMTC, Dept Met & Mat Engn, Chennai 600 036, Tamilnadu, India
[5] Aaivalayam DIRAC, Ctr Adv Mat, Coimbatore 641046, Tamilnadu, India
[6] Koneru Lakshmaiah Educ Fdn, Dept Elect & Commun Engn, Hyderabad 500075, Telangana, India
[7] Univ Madras, Natl Ctr Nanosci & Nanotechnol, Guindy Campus, Chennai 600025, Tamilnadu, India
[8] JP Coll Engn, Dept Sci & Humanities, Tenkasi 627852, Tamilnadu, India
[9] Univ Madras, Dept Energy, Guindy Campus, Chennai 600025, Tamilnadu, India
关键词
InGaN; MOCVD; Spiral like islands; Photoluminescence; Hall mobility; GALLIUM NITRIDE NANOWIRES; STRANSKI-KRASTANOV; NANOSCALE ISLANDS; LAYERS; INTERLAYER; THICKNESS;
D O I
10.1016/j.mssp.2022.106479
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
InGaN layers were grown by metal organic chemical vapour deposition (MOCVD) technique on GaN/sapphire substrates by varying the growth time. The formation of spiral-like growth domains was observed using atomic force microscopy, revealed that the InGaN layer is atomically flat. In addition, the surface roughness was found to be dependent on the thickness of InGaN layer. The spiral-like islands was correlated with screw type threading dislocation density of InGaN. The thickness-dependent threading dislocation density was investigated using high resolution x-ray diffraction. The Indium composition and thickness of InGaN were found to be 15-16% and 20-50 nm using the smooth fit software. The structural characteristics obtained using reciprocal space mapping indicate that the InGaN/GaN heterostructures are coherently strained. Photoluminescence (PL) spectra exhibit variations in the band-edge emissions between 437.0 and 443.5 nm peaks with varying temperature, showcasing a slight shift in all the InGaN samples. The low-temperature PL spectra revealed dominant emission mechanism. From the hall effect data it was observed that InGaN layer attained high mobility value close to that of the theoretical limit of GaN and/or InN at 300 K. It is worth to note that the compressive strain present in InGaN layer led to high sheet concentration when compared to that of the tensile strained InGaN layer. Hence, the spiral like islands entrenched InGaN layers which can be effectively utilized for optoelectronic applications.
引用
收藏
页数:12
相关论文
共 50 条
  • [21] Influence of ion beam bombardment on characteristic of InGaN/GaN single quantum well grown by metal–organic chemical vapor deposition
    Seung-Kyu Choi
    Jae-Min Jang
    Sung-Hak Yi
    Jung-A Kim
    Woo-Gwang Jung
    Journal of Electroceramics, 2009, 23 : 180 - 184
  • [22] Correlation between structural and optical properties of a-plane GaN films grown on r-plane sapphire by metal organic chemical-vapor deposition
    Jung, Mina
    Chang, Jiho
    Lee, Hyunjae
    Ha, Jun-seok
    Park, Jin-sub
    Park, Seungwhan
    Fujii, Katsushi
    Yao, Takafumi
    Kil, Gyung-suk
    Lee, Seogwoo
    Cho, Myungwhan
    Whang, Sungmin
    Seo, Yong-gon
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (03): : 623 - 626
  • [23] Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
    Wang, Ch. Y.
    Cimalla, V.
    Romanus, H.
    Kups, Th.
    Niebelschuetz, M.
    Ambacher, O.
    THIN SOLID FILMS, 2007, 515 (16) : 6611 - 6614
  • [24] Studies on the coupling correlation and strain state of AlGaN/GaN double channel heterostructures grown by metal organic chemical vapor deposition
    Zhang, Yachao
    Wang, Baiqi
    Ma, Jinbang
    Yao, Yixin
    Chen, Kai
    Wang, Xing
    Xu, Shengrui
    Zhang, Jincheng
    Hao, Yue
    JOURNAL OF ALLOYS AND COMPOUNDS, 2023, 942
  • [25] InAlN/InGaN/GaN double heterostructure with improved carrier confinement and high-temperature transport performance grown by metal-organic chemical vapor deposition
    Zhao, Yi
    Xue, Jun Shuai
    Zhang, Jin Cheng
    Zhou, Xiao Wei
    Yue, Ya Chao Zhang
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (07)
  • [26] Investigation of structural and optical anisotropy of m-plane InN films grown on γ-LiAlO2(100) by metal organic chemical vapour deposition
    Fu, D.
    Zhang, R.
    Liu, B.
    Xie, Z. L.
    Xiu, X. Q.
    Gu, S. L.
    Lu, H.
    Zheng, Y. D.
    Chen, Y. H.
    Wang, Z. G.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (24)
  • [27] Influence of ion beam bombardment on characteristic of InGaN/GaN single quantum well grown by metal-organic chemical vapor deposition
    Choi, Seung-Kyu
    Jang, Jae-Min
    Yi, Sung-Hak
    Kim, Jung-A
    Jung, Woo-Gwang
    JOURNAL OF ELECTROCERAMICS, 2009, 23 (2-4) : 180 - 184
  • [28] Photoluminescence studies of high-quality InAlN layer lattice-matched to GaN grown by metal organic chemical vapor deposition
    Chen, Z. T.
    Sakai, Y.
    Egawa, T.
    APPLIED PHYSICS LETTERS, 2010, 96 (19)
  • [29] Field dependent transformation of electron traps in GaN p-n diodes grown by metal-organic chemical vapour deposition
    Asghar, M
    Muret, P
    Beaumont, B
    Gibart, P
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 113 (03): : 248 - 252
  • [30] Optical and Electrical Properties of ZnO Hybrid Structure Grown on Glass Substrate by Metal Organic Chemical Vapor Deposition
    Kim, Dae-Sik
    Kang, Byung Hoon
    Lee, Chang-min
    Byun, Dongjin
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2014, 24 (10): : 543 - 549