Review on Piezoelectric Actuators Based on High-Performance Piezoelectric Materials

被引:114
作者
Jin, Haonan [1 ,2 ]
Gao, Xiangyu [1 ,2 ]
Ren, Kaile [1 ,2 ]
Liu, Jinfeng [1 ,2 ]
Qiao, Liao [1 ,2 ]
Liu, Mingzi [1 ,2 ]
Chen, Wei [3 ]
He, Yuhang [3 ]
Dong, Shuxiang [4 ,5 ]
Xu, Zhuo [1 ,2 ]
Li, Fei [1 ,2 ]
机构
[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Elect Mat Res Lab, Key Lab,Educ Minist, Xian 710049, Peoples R China
[2] Xi An Jiao Tong Univ, Sch Elect Sci & Engn, Xian 710049, Peoples R China
[3] OPPO Guangdong Mobile Commun Co Ltd, Shenzhen 518051, Peoples R China
[4] Peking Univ, Sch Mat Sci & Engn, Beijing 100871, Peoples R China
[5] Shenzhen Univ, Inst Adv Study, Shenzhen 518051, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
Ceramics; Crystals; Piezoelectric materials; Piezoelectric actuators; Lead; Temperature distribution; Metamaterials; piezoelectric actuators; piezoelectric materials; piezoelectric motors; ELECTRICAL-PROPERTIES; ULTRASONIC MOTORS; TEMPERATURE; CERAMICS; BIMORPH; DESIGN;
D O I
10.1109/TUFFC.2022.3175853
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
The piezoelectric actuator is a kind of actuation device that acts through the inverse piezoelectric effect. Due to advantages of high precision, low power consumption, compact size, and flexible structure design, they have a wide range of applications in optics, robotics, microelectromechanical systems, and so on. Piezoelectric materials are the core materials for piezoelectric actuators. In this review, recent developments in high-performance piezoelectric materials (HPMs) are introduced, including relaxor ferroelectric crystals, textured ceramics, piezoelectric metamaterials, and so on. The advances of piezoelectric actuators are introduced in this review based on the developments of those piezoelectric materials, where the relationship between the figure of merits of materials and the performance of actuators is also discussed. Finally, we present outlooks and challenges for piezoelectric materials and actuators.
引用
收藏
页码:3057 / 3069
页数:13
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