LED source interferometer for microscopic fringe projection profilometry using a Gates' interferometer configuration

被引:11
作者
Ruben Sanchez, Jose [1 ]
Martinez-Garcia, Amalia [1 ]
Antonio Rayas, Juan [1 ]
Leon-Rodriguez, Miguel [2 ]
机构
[1] Ctr Invest Opt AC, Guanajuato 37150, Mexico
[2] Univ Politecn Guanajuato, Av Univ Sur 1001 CP, Guanajuato 38496, Mexico
关键词
Surface metrology; Gates' interferometer; Fringe projection; Resolution; Microscopic fringe projection profilometry; SPATIAL COHERENCE; PHASE;
D O I
10.1016/j.optlaseng.2021.106822
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The fringe projection technique is considered one of the most reliable solutions for structured light technology, developed for non-contact three-dimensional (3D) data acquisition. When working with this technique, applying it on a microscopic scale, one often encounters some problems such as the limited depth of field of the projected fringe pattern, typical of the imaging lenses, or the formation of speckle-noise when laser interferometric fringes are projected, which are problems that can cause significant errors on test surfaces whose height exceeds the depth of field, and on which, the other hand, speckle noise affects the resolution of the technique. This paper presents a Gates' interferometer configuration with a LED source to project a fringe pattern without speckle noise and a very long field depth. We explain how a non-located sinusoidal fringe pattern can be obtained using two-beamsplitter cubes and a LED light source. Moreover, we compare measurements made using the LED and laser concerning a commercial contact profilometer.
引用
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页数:7
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