Illumination-invariant phase-shifting algorithm for three-dimensional profilometry of a moving object

被引:9
作者
Deng, Fuqin [2 ]
Liu, Chang
Sze, Wuifung
Deng, Jiangwen [1 ]
Fung, Kenneth S. M. [1 ]
Leung, Winghong [1 ]
Lam, Edmund Y. [2 ]
机构
[1] ASM Pacific Technol Ltd, Dept Res & Dev, Kwai Chung, Hong Kong, Peoples R China
[2] Univ Hong Kong, Imaging Syst Lab, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
关键词
three-dimensional image acquisition; industrial inspection; surface measurements; profilometry; HIGH-RESOLUTION; VIBRATION;
D O I
10.1117/1.OE.51.9.097001
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Uneven illumination is a common problem in practical optical systems designed for machine vision applications, and it leads to significant errors when phase-shifting algorithms (PSA) are used to reconstruct the surface of a moving object. We propose an illumination-reflectivity-focus model to characterize this uneven illumination effect on phase-measuring profilometry. With this model, we separate the illumination factor effectively and consider the phase reconstruction from an optimization perspective. Furthermore, we formulate an illumination-invariant phase-shifting algorithm (II-PSA) to reconstruct the surface of a moving object under an uneven illumination environment. Experimental results show that it can improve the reconstruction quality both visually and numerically. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.51.9.097001]
引用
收藏
页数:11
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