Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part I:. Elastic scattering

被引：50

作者：

Cosgriff, E.C. ^{[1
]}

D'Alfonso, A.J. ^{[2
]}

Allen, L.J. ^{[2
]}

Findlay, S.D. ^{[2
,3
]}

Kirkland, A.I. ^{[1
]}

Nellist, P.D. ^{[1
]}

机构：

[1] Department of Materials, University of Oxford, Oxford

[2] School of Physics, University of Melbourne, Parkville

[3] Institute of Engineering Innovation, The University of Tokyo, Tokyo, 113-8656, 2-11-16, Yayoi, Bunkyo

来源：

Ultramicroscopy | 2008年 / 108卷 / 12期

基金：

澳大利亚研究理事会; 英国工程与自然科学研究理事会;

关键词：

Aberration-correction; Depth sectioning; Scanning transmission electron microscopy;

D O I：

10.1016/j.ultramic.2008.05.009

中图分类号：

TN2 [光电子技术、激光技术];

学科分类号：

0803 ; 080401 ; 080901 ;

摘要：

A transmission electron microscope fitted with both pre-specimen and post-specimen spherical aberration correctors enables the possibility of aberration-corrected scanning confocal electron microscopy. Imaging modes available in this configuration can make use of either elastically or inelastically scattered electrons. In this paper we consider image contrast for elastically scattered electrons. It is shown that there is no linear phase contrast in the confocal condition, leading to very low contrast for a single atom. Multislice simulations of a thicker crystalline sample show that sample vertical location and thickness can be accurately determined. However, buried impurity layers do not give strong, nor readily interpretable contrast. The accompanying paper examines the detection of inelastically scattered electrons in the confocal geometry. © 2008 Elsevier B.V. All rights reserved.

引用

页码：1558 / 1566

页数：8