Hard x-ray photoelectron spectroscopy reference spectra of W with Cr Kα excitation

被引:2
作者
Zheng, Dong [1 ]
Young, Christopher N. [2 ]
Stickle, William F. [2 ]
机构
[1] HP Singapore Private Ltd, Adv Mat & Test Ctr, 138 Depot Rd, Singapore 109683, Singapore
[2] HP Inc, Analyt & Dev Labs, Corvallis, OR 97330 USA
来源
SURFACE SCIENCE SPECTRA | 2023年 / 30卷 / 02期
关键词
HAXPES; Auger; W; Tungsten; Cr K-alpha;
D O I
10.1116/6.0003061
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Hard x-ray photoelectron spectroscopy using monochromatic Cr K-alpha radiation (5414.8 eV) has been used to acquire XPS and Auger data on a sputtered W sample. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
引用
收藏
页数:13
相关论文
共 2 条
[1]  
Moulder J., 1992, HDB XRAY PHOTOELECTR
[2]  
Zborowski T., 2022, Surf. Sci. Spectra, V29