Ellipsometry, transmission, and photoluminescence characterization of Mn-doped ITO thin films deposited by DC magnetron sputtering

被引：2

作者：

Kaveh, Masoud ^{[1
]}

Lawrence, David ^{[2
]}

Bender, Scott ^{[3
]}

Hirt, Daniel ^{[3
]}

Riffe, William ^{[3
]}

Constantin, Costel ^{[1
]}

机构：

[1] James Madison Univ, Dept Phys & Astron, Harrisonburg, VA 22807 USA

[2] James Madison Univ, Coll Integrated Sci & Engn, Harrisonburg, VA USA

[3] Univ Virginia, Dept Mech & Aerosp Engn, Charlottesville, VA USA

来源：

MATERIALS RESEARCH EXPRESS | 2023年 / 10卷 / 10期

关键词：

DC magnetron sputtering; Mn-ITO; thin films; ellipsometry; photoluminescence; bandgap; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; ELECTRONIC-STRUCTURE; IN2O3; FILMS; BAND-GAP; BEAM; FERROMAGNETISM; RECOMBINATION; ABSORPTION;

D O I：

10.1088/2053-1591/acfecd

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Manganese-doped indium tin oxide (ITO) thin films (0-12.8 at% Mn) were deposited by DC magnetron sputtering. The structural, electrical, and optical properties of the films were studied. Optical characterization was emphasized and included ellipsometry, transmission, and photoluminescence (PL) measurements. Features of the energy band structure of ITO and Mn-ITO were extracted from PL spectra and Tauc analyses of absorption data. We concluded that the fundamental bandgap of ITO is similar to 2.8 eV. A separate deep valence band, similar to 0.8 eV below the valence band maximum, was confirmed to be involved in higher energy optical absorption and emission transitions. Both of these observations were consistent with recent published theoretical studies and spectroscopic measurements (XPS, XES, etc). Mn addition was found to result in a decrease of the transition energies. Additionally, Burstein-Moss shifts were observed.

引用

页数：13

共 63 条

[1] Structural, optical and gas sensing properties of pure and Mn-doped In2O3 nanoparticles [J].

Anand, Kanica ;

Kaur, Jasmeet ;

Singh, Ravi Chand ;

Thangaraj, Rengasamy .

CERAMICS INTERNATIONAL, 2016, 42 (09) :10957-10966

[2] Zr-Doped Indium Oxide (IZRO) Transparent Electrodes for Perovskite-Based Tandem Solar Cells [J].

Aydin, Erkan ;

De Bastiani, Michele ;

Yang, Xinbo ;

Sajjad, Muhammad ;

Aljamaan, Faisal ;

Smirnov, Yury ;

Hedhili, Mohamed Nejib ;

Liu, Wenzhu ;

Allen, Thomas G. ;

Xu, Lujia ;

Van Kerschaver, Emmanuel ;

Morales-Masis, Monica ;

Schwingenschloegl, Udo ;

De Wolf, Stefaan .

ADVANCED FUNCTIONAL MATERIALS, 2019, 29 (25)

[3] Room-temperature ferromagnetic and photoluminescence properties of indium-tin-oxide nanoparticles synthesized by solid-state reaction [J].

Babu, S. Harinath ;

Rao, N. Madhusudhana ;

Kaleemulla, S. ;

Amarendra, G. ;

Krishnamoorthi, C. .

BULLETIN OF MATERIALS SCIENCE, 2017, 40 (01) :17-23

[4] Studies on Ferromagnetic and Photoluminescence Properties of ITO and Cu-Doped ITO Nanoparticles Synthesized by Solid State Reaction [J].

Babu, S. Harinath ;

Kaleemulla, S. ;

Rao, N. Madhusudhana ;

Krishnamoorthi, C. .

JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (11) :5703-5708

[5] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS INDIUM OXIDE [J].

BELLINGHAM, JR ;

PHILLIPS, WA ;

ADKINS, CJ .

JOURNAL OF PHYSICS-CONDENSED MATTER, 1990, 2 (28) :6207-6221

[6] Indium oxide-a transparent, wide-band gap semiconductor for (opto)electronic applications [J].

Bierwagen, Oliver .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (02)

[7] Temperature dependence of the key electro-optical characteristics for midinfrared emitting quantum cascade lasers [J].

Botez, D. ;

Kumar, S. ;

Shin, J. C. ;

Mawst, L. J. ;

Vurgaftman, I. ;

Meyer, J. R. .

APPLIED PHYSICS LETTERS, 2010, 97 (07)

[8] Growth of In2O3(100) on Y-stabilized ZrO2(100) by O-plasma assisted molecular beam epitaxy [J].

Bourlange, A. ;

Payne, D. J. ;

Egdell, R. G. ;

Foord, J. S. ;

Edwards, P. P. ;

Jones, M. O. ;

Schertel, A. ;

Dobson, P. J. ;

Hutchison, J. L. .

APPLIED PHYSICS LETTERS, 2008, 92 (09)

[9] Degradation of magnetic ordering in In2O3 thin films due to Mn and Cu dopings [J].

Brize, Virginie ;

Sakai, Joe ;

Hong, Nguyen Hoa .

PHYSICA B-CONDENSED MATTER, 2007, 392 (1-2) :379-382

[10] Effect of doping concentration, temperature and magnetic field on magnetic properties of Mn doped ITO nanoparticles and thin films [J].

Chakraborty, Deepannita ;

Shaik, Kaleemulla .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2019, 486

← 1 2 3 4 5 6 7 →