[1] Natl Res Council CNR, Inst Microelect & Microsyst IMM, Str VIII N5, I-95121 Catania, Italy
[2] Brno Univ Technol, Fac Chem, Mat Res Ctr, Purkynova 118, Brno 61200, Czech Republic
[3] Brno Univ Technol, Cent European Inst Technol CEITEC, Purkynova 656-123, Brno 61200, Czech Republic