Thermomechanical model of an oxide-confined GaAs-based VCSEL emitter

被引:4
作者
Coppeta, R. A. [1 ]
Fabbro, R. [2 ]
Pusterhofer, M. [2 ]
Haber, T. [1 ]
Fasching, G. [1 ]
机构
[1] Ams OSRAM, Premstaetten, Austria
[2] Graz Univ Technol, Graz, Austria
关键词
VCSEL; Dark line defects; Lattice mismatch; Oxide shrinkage; Thermal stress; RECOMBINATION; DEGRADATION;
D O I
10.1016/j.microrel.2022.114828
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A thermomechanical model for an oxide-confined GaAs-based VCSEL emitter is presented. The impact of the lattice mismatch, the oxide shrinkage and the thermal stress on the mechanical reliability is evaluated. Under standard operating conditions, calculations show that the temperature increase has a negligible influence on the overall mechanical stress. The oxide shrinkage highly deforms the epitaxial structure at the edge of the optical aperture. At oxide corners, the calculated stress is beyond the experimental yield strength of GaAs micro-pillars, enabling the nucleation of the dislocations forming dark line defects. The high misfit stress in the quantum well layers can favor there the dislocation propagation.
引用
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页数:7
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共 52 条
[31]  
Mathes D.T., 2002, THESIS U VIRGINIA
[32]   Nanoscale materials characterization of degradation in VCSELs [J].
Mathes, DT ;
Hull, R ;
Choquette, K ;
Geib, K ;
Allerman, A ;
Guenter, J ;
Hawkins, B ;
Hawthorne, B .
VERTICAL-CAVITY SURFACE-EMITTING LASERS VII, 2003, 4994 :67-82
[33]  
Mathias M., 2009, THESIS HUMBOLDT U BE
[34]  
Michalzik R., 2012, Springer Series in Optical Sciences
[35]   Plastic deformation of gallium arsenide micropillars under uniaxial compression at room temperature [J].
Michler, Johann ;
Wasmer, Kilian ;
Meier, Stephan ;
Ostlund, Fredrik ;
Leifer, Klaus .
APPLIED PHYSICS LETTERS, 2007, 90 (04)
[36]   DIRECT OBSERVATION OF PHONONS GENERATED DURING NONRADIATIVE CAPTURE IN GAAS P-N-JUNCTIONS [J].
NARAYANAMURTI, V ;
LOGAN, RA ;
CHIN, MA .
PHYSICAL REVIEW LETTERS, 1978, 40 (01) :63-66
[37]  
Perez N., 2017, THEORY ELASTICITY
[38]  
Preeti Wadhwani S.Y., 2021, VCSEL MARKET SIZE TY
[39]  
Ram R.J., 2005, C LASERS ELECTRO OPT, pCWI2
[40]   A comprehensive VCSEL device simulator [J].
Streiff, M ;
Witzig, A ;
Pfeiffer, M ;
Royo, P ;
Fichtner, W .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2003, 9 (03) :879-891