ToF-SIMS analysis of ultrathin films and their fragmentation patterns

被引:3
作者
Muramoto, Shin [1 ]
Graham, Daniel J. [2 ,3 ]
Castner, David G. [2 ,3 ,4 ]
机构
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
[2] Univ Washington, Natl ESCA & Surface Anal Ctr Biomed Problems, Natl ESCA & Surface Anal Ctr Biomed Problems, Seattle, WA 98195 USA
[3] Univ Washington, Dept Bioengn, Seattle, WA 98195 USA
[4] Univ Washington, Dept Chem Engn, Dept Chem Engn, Seattle, WA 98195 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2024年 / 42卷 / 02期
基金
美国国家卫生研究院;
关键词
ION MASS-SPECTROMETRY; SELF-ASSEMBLED MONOLAYERS; ADSORBED PROTEIN FILMS; PLASMA POLYMERIZATION; CARBON-FILMS; DEGRADATION MECHANISMS; CHEMICAL-ANALYSIS; LOW-PRESSURE; THIN-FILMS; IN-VITRO;
D O I
10.1116/6.0003249
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Organic thin films are of great interest due to their intriguing interfacial and functional properties, especially for device applications such as thin-film transistors and sensors. As their thickness approaches single nanometer thickness, characterization and interpretation of the extracted data become increasingly complex. In this study, plasma polymerization is used to construct ultrathin films that range in thickness from 1 to 20 nm, and time-of-flight secondary ion mass spectrometry coupled with principal component analysis is used to investigate the effects of film thickness on the resulting spectra. We demonstrate that for these cross-linked plasma polymers, at these thicknesses, the observed trends are different from those obtained from thicker films with lower degrees of cross-linking: contributions from ambient carbon contamination start to dominate the mass spectrum; cluster-induced nonlinear enhancement in secondary ion yield is no longer observed; extent of fragmentation is higher due to confinement of the primary ion energy; and the size of the primary ion source also affects fragmentation (e.g., Bi1 versus Bi5). These differences illustrate that care must be taken in choosing the correct primary ion source as well as in interpreting the data.
引用
收藏
页数:9
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