High-Performance Low-Voltage Transparent Metal-Semiconductor-Metal Ultraviolet Photodetectors Based on Ultrathin Gold Asymmetric Interdigitated Electrodes

被引:3
|
作者
Huang, Jianfeng [1 ]
Yang, Liu [1 ,2 ]
He, Sailing [1 ,2 ,3 ]
机构
[1] Zhejiang Univ, Coll Opt Sci & Engn, Natl Engn Res Ctr Opt Instruments, Ctr Opt & Electromagnet Res, 866 Yuhangtang Rd, Hangzhou 310058, Peoples R China
[2] Zhejiang Univ, Ningbo Res Inst, Ningbo 315100, Peoples R China
[3] Royal Inst Technol KTH, Joint Res Ctr Photon, Sch Elect Engn, S-10044 Stockholm, Sweden
基金
中国国家自然科学基金;
关键词
transparent ultraviolet photodetector; ultrathin metal film; asymmetric interdigitated electrodes; FULLY TRANSPARENT; OXIDE; HETEROJUNCTION; GRAPHENE; PAIR;
D O I
10.3390/mi14071447
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A high-performance, low-voltage, transparent, metal-semiconductor-metal ultraviolet (UV) photodetector (PD) is proposed and experimentally demonstrated, based on gold (Au) asymmetric interdigitated (aIDT) electrodes with thicknesses well below 10 nm. A 7-nm-thick Au film, with a visible transmittance of 80.4% and a sheet resistance of 11.55 & omega;/sq, is patterned into aIDT electrodes on a ZnO active layer, whose average visible transmittance is up to 74.3%. Meshing the pads further improves the overall transmittance of the device. Among all fabricated devices, the PD with the aIDT finger width ratio of 1:4 performs the best. Very low dark currents are achieved at 0, 0.5 and 1 V, allowing for high responsivities and specific detectivities to the UV light. It is also a fast device, especially under the biases of 0.5 and 1 V. The comprehensive performances are comparable and even superior to those of the reported devices. The asymmetric Schottky junctions induced by the aIDT electrodes under UV illumination are the main mechanism for the low-voltage operation of our transparent PD, which is promising to be applied widely.
引用
收藏
页数:14
相关论文
共 50 条
  • [41] Very high-speed metal-semiconductor-metal ultraviolet photodetectors fabricated on GaN
    Carrano, JC
    Li, T
    Brown, DL
    Grudowski, PA
    Eiting, CJ
    Dupuis, RD
    Campbell, JC
    APPLIED PHYSICS LETTERS, 1998, 73 (17) : 2405 - 2407
  • [42] Influence of threading dislocations on GaN-based metal-semiconductor-metal ultraviolet photodetectors
    Li, Dabing
    Sun, Xiaojuan
    Song, Hang
    Li, Zhiming
    Chen, Yiren
    Miao, Guoqing
    Jiang, Hong
    APPLIED PHYSICS LETTERS, 2011, 98 (01)
  • [43] Metal-Semiconductor-Metal Ultraviolet Photodetectors Based on Zinc-Oxide Colloidal Nanoparticles
    Qin, Liqiao
    Shing, Christopher
    Sawyer, Shayla
    IEEE ELECTRON DEVICE LETTERS, 2011, 32 (01) : 51 - 53
  • [44] Sensing performance of β-Ga2O3 metal-semiconductor-metal deep ultraviolet photodetectors with refractory TiW electrodes at high temperatures
    Zhang, Maolin
    Ma, Wanyu
    Liu, Zeng
    Yang, Lili
    Li, Shan
    Guo, Yufeng
    Tang, Weihua
    RESULTS IN PHYSICS, 2023, 54
  • [45] ZnO-based resonant cavity enhanced metal-semiconductor-metal ultraviolet photodetectors
    Lee, Hsin-Ying
    Hsu, Yu-Ting
    Lee, Ching-Ting
    SOLID-STATE ELECTRONICS, 2013, 79 : 223 - 226
  • [46] High-performance back-illuminated solar-blind AlGaN metal-semiconductor-metal photodetectors
    Lambert, DJH
    Yang, B
    Li, T
    Collins, CJ
    Wong, MM
    Chowdhury, U
    Shelton, BS
    Beck, AL
    Campbell, JC
    Dupuis, RD
    2001 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 2000, : 525 - 530
  • [47] High-performance back-illuminated solar-blind AlGaN metal-semiconductor-metal photodetectors
    Yang, B
    Lambert, DJH
    Li, T
    Collins, CJ
    Wong, MM
    Chowdhury, U
    Dupuis, RD
    Campbell, JC
    ELECTRONICS LETTERS, 2000, 36 (22) : 1866 - 1867
  • [48] Nitride-based ultraviolet metal-semiconductor-metal photodetectors with low-temperature GaN cap layers and Ir/Pt contact electrodes
    Chang, S. J.
    Yu, C. L.
    Chen, C. H.
    Chang, P. C.
    Huang, K. C.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (03): : 637 - 640
  • [49] AlGaN ultraviolet metal-semiconductor-metal photodetectors with low-temperature-grown cap layers
    Chang, Shoou-Jinn
    Hung, Hung
    Lin, Yi-Chao
    Wu, Ming-Hsien
    Kuan, Hon
    Lin, Ray-Ming
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (4B): : 2471 - 2473
  • [50] Role of threading dislocations and point defects in the performance of GaN-based metal-semiconductor-metal ultraviolet photodetectors
    Chatterjee, Abhishek
    Khamari, Shailesh K.
    Kumar, R.
    Porwal, S.
    Bose, A.
    Sharma, T.K.
    Superlattices and Microstructures, 2020, 148