[1] Tianjin Univ, Sch Microelect, Tianjin 300072, Peoples R China
[2] Tianjin Univ, Key Lab Adv Ceram & Machining Technol, Minist Educ, Tianjin 300072, Peoples R China
[3] Tianjin Univ, Tianjin Key Lab Imaging & Sensing Microelect Techn, Tianjin 300072, Peoples R China
[4] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China