[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Acad Innovat Semicond & Sustainable Mfg, Program Smart & Sustainable Mfg, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Hierarch Green Energy Mat Hi GEM Res Ctr, Tainan 70101, Taiwan
[4] Natl Cheng Kung Univ, Core Facil Ctr, Tainan 70101, Taiwan