Piezoelectric Micromachined Ultrasonic Transducers for Consumer Electronics Applications

被引：6
作者：
Zhao, Lei [1 ]
Lu, Yipeng [1 ]
机构：
[1] Peking Univ, Beijing, Peoples R China
来源：
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM | 2023年
关键词：
PMUT; MEMS; ultrasound transducers; piezoelectric devices; consumer electronics;
D O I：
10.1109/JCS57290.2023.10102962
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents design, fabrication and system integration of piezoelectric micromachined ultrasonic transducer (PMUT) array for consumer electronics applications, which require transducers with characteristics of small size, large bandwidth, low power consumption, high yield process of transducer array and integration.
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页数：3
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