Room-Temperature Epitaxial Growth of Zn-Doped Iron Oxide Films on c-, a-, and r-Cut Sapphire Substrates

被引:1
作者
Demange, Valerie [2 ]
Portier, Xavier [1 ]
Ollivier, Sophie [2 ]
Pasturel, Mathieu [2 ]
Roisnel, Thierry [2 ]
Guilloux-Viry, Maryline [2 ]
Hebert, Christian [3 ]
Nistor, Magdalena [4 ]
Cachoncinlle, Christophe [5 ]
Millon, Eric [5 ]
Perriere, Jacques [3 ]
机构
[1] Normandie Univ, Ctr Rech Ions MAt & Photon CIMAP, CEA, UMR CNRS 6252,ENSICAEN, F-14050 Caen, France
[2] Univ Rennes, CNRS, ScanMat UAR 2025, ISCR,UMR 6226, F-35000 Rennes, France
[3] Sorbonne Univ, CNRS, UMR 7588, Inst NanoSci Paris INSP, F-75252 Paris 05, France
[4] Natl Inst Lasers Plasma & Radiat Phys NILPRP, Magurele 077125, Romania
[5] Univ Orleans, GREMI, CNRS, UMR 7344, F-45067 Orleans 2, France
关键词
CEO2; THIN-FILMS; PULSED-LASER DEPOSITION; PLANE SAPPHIRE; OPTICAL-PROPERTIES; BUFFER LAYERS; MGO; WURTZITE; SI(111); OXYGEN; ION;
D O I
10.1021/acs.cgd.3c00404
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The room-temperature growth of zinc-doped iron oxide films (Zn:FeOx) was studied on c-cut, a-cut, and r-cut sapphire substrates using the pulsed-laser deposition method. Rutherford backscattering spectrometry, X-ray diffraction analysis, pole figure measurements, and transmission electron microscopy were used to determine the nature of the oxide phases (wustite and/or spinel) present in the films, their precise texture and in-plane epitaxial relationships between films and substrates. On c-cut sapphire, both wustite and spinel phases were present with a (111) texture. The wustite phase was mainly found at the film-substrate interface, while the spinel was observed in the upper part of the film. On the a-cut and r-cut substrates, the main phase observed was the wustite, with a very small spinel contribution. The (111) and (100) wustite textures were obtained on the a-cut and r-cut substrates, respectively. The in-plane epitaxial relationships between the Zn-doped iron oxide phases and the substrates were deduced from transmission electron spectroscopy observations and pole figure measurements. The possible mechanisms of the room temperature epitaxial growth of the oxide films on r-cut and a-cut sapphire substrates are presented and discussed.
引用
收藏
页码:8534 / 8543
页数:10
相关论文
共 69 条
[1]   Room-temperature epitaxial growth of CeO2(001) thin films on Si(001) substrates by electron beam evaporation [J].
Ami, T ;
Ishida, Y ;
Nagasawa, N ;
Machida, A ;
Suzuki, M .
APPLIED PHYSICS LETTERS, 2001, 78 (10) :1361-1363
[2]   (001) and (111) Single-Oriented Highly Epitaxial CeO2 Thin Films on r-Cut Sapphire Substrates [J].
Bick, D. S. ;
Sharath, S. U. ;
Hoffman, I. ;
Major, M. ;
Kurian, J. ;
Alff, L. .
JOURNAL OF ELECTRONIC MATERIALS, 2015, 44 (08) :2930-2938
[3]   Determination of the local chemistry of iron in inorganic and organic materials [J].
Calvert, CC ;
Brown, A ;
Brydson, R .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 2005, 143 (2-3) :173-187
[4]   Epitaxial Growth and Properties of Doped Transition Metal and Complex Oxide Films [J].
Chambers, Scott A. .
ADVANCED MATERIALS, 2010, 22 (02) :219-248
[5]   Perovskite lead titanate PLD thin films:: study of oxygen incorporation by 18O tracing technique [J].
Chaoui, N ;
Millon, E ;
Muller, JF ;
Ecker, P ;
Bieck, W ;
Migeon, HN .
MATERIALS CHEMISTRY AND PHYSICS, 1999, 59 (02) :114-119
[6]   On the role of ambient oxygen in the formation of lead titanate pulsed laser deposition thin films [J].
Chaoui, N ;
Millon, E ;
Muller, JF ;
Ecker, P ;
Bieck, W ;
Migeon, HN .
APPLIED SURFACE SCIENCE, 1999, 138 :256-260
[7]   Effect of substrate microstructure on the misorientation of a-plane ZnO film investigated using x-ray diffraction [J].
Chen, Jinju ;
Deng, Hong ;
Ji, Hong ;
Tian, Yanlei .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (03)
[8]   Van der Waals oxide heteroepitaxy [J].
Chu, Ying-Hao .
NPJ QUANTUM MATERIALS, 2017, 2
[9]   Influence of Si concentration on electrical and optical properties of room temperature ZnO:Si thin films [J].
Clatot, J. ;
Nistor, M. ;
Rougier, A. .
THIN SOLID FILMS, 2013, 531 :197-202
[10]   Epitaxial ZnO films grown on sapphire (001) by ultraviolet-assisted pulsed laser deposition [J].
Craciun, V ;
Singh, RK ;
Perriere, J ;
Spear, J ;
Craciun, D .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (03) :1077-1079