Simple spatially resolved period measurement of chirped pulse compression gratings

被引：3

作者：

Bienert, Florian ^{[1
]}

Roecker, Christoph ^{[1
]}

Graf, Thomas ^{[1
]}

Ahmed, Marwan Abdou ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Strahlwerkzeuge IFSW, Pfaffenwaldring 43, D-70569 Stuttgart, Germany

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 12期

基金：

欧盟地平线“2020”;

关键词：

GROOVE DENSITY; ACCURATE;

D O I：

10.1364/OE.489238

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present an easy-to-implement and low-cost setup for the precise measurement of the period chirp of diffraction gratings offering a resolution of 15 pm and reasonable scan speeds of 2 seconds per measurement point. The principle of the measurement is illustrated on the example of two different pulse compression gratings, one fabricated by laser interference lithography (LIL) and the other by scanning beam interference lithography (SBIL). A period chirp of 0.22 pm/mm2 at a nominal period of 610 nm was measured for the grating fabricated with LIL, whereas no chirp was observed for the grating fabricated by SBIL, which had a nominal period of 586.2 nm.

引用

页码：19392 / 19403

页数：12

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