3D Measurements and Characterizations of Refractive Index Distributions of Volume Holographic Gratings Using Low-Coherence Holotomography

被引:0
作者
Jo, Jaepil [1 ,2 ]
Baek, Dongjae [3 ]
Hugonnet, Herve [1 ,2 ]
Kim, Kwangjin [3 ]
Ji, Hyungu [4 ]
Lim, Yongjun [5 ]
Kim, Taehong [4 ]
Lee, Seungwoo [3 ,5 ,6 ,7 ,8 ]
Park, Yongkeun [1 ,2 ,4 ]
机构
[1] Korea Adv Inst Sci & Technol, KAIST Inst Hlth Sci & Technol, Daejeon 34141, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Phys, Daejeon 34141, South Korea
[3] Korea Univ, KU KIST Grad Sch Converging Sci & Technol, Seoul 02841, South Korea
[4] Tomocube Inc, Daejeon 34109, South Korea
[5] Korea Univ, Dept Biomicrosyst Technol, Seoul 02841, South Korea
[6] Korea Univ, Dept Integrat Energy Engn, Seoul 02841, South Korea
[7] Korea Univ, KU Photon Ctr, Seoul 02841, South Korea
[8] Korea Inst Sci & Technol KIST, Ctr Optoelect Mat & Devices, Postsilicon Semicond Inst, Seoul 02792, South Korea
基金
新加坡国家研究基金会;
关键词
holographic optical elements; holotomography; quantitative phase imaging; refractive index; volume holographic gratings; AUGMENTED REALITY; OPTICAL-ELEMENTS; DIFFRACTION EFFICIENCY; OXYGEN INHIBITION; PHASE MICROSCOPY; DIFFUSION-MODEL; INTERFEROMETER; ELLIPSOMETRY; ENHANCEMENT; REFLECTION;
D O I
10.1002/adom.202302048
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Holographic Optical Elements (HOEs) employ refractive index (RI) modulation to manipulate light, establishing their widespread application in augmented and virtual reality technologies. Despite significant strides in HOEs' fabrication, a comprehensive 3D examination and measurement of these elements remain largely unexplored. This study targets this void by conducting an in-depth exploration of the 3D RI distributions of volume holographic gratings (VHGs), a quintessential representative of HOEs. Direct tomographic measurements of the 3D RI distributions within millimeter-scale VHGs are performed at a spatial resolution of 156 nm x 156 nm x 1.2 mu m and an RI precision of 2x10-4. This level of precision facilitates a systematic high-resolution characterization of VHGs. The findings present a substantial evolution from traditional measurement techniques and promise to considerably advance the evaluation of intricate HOE structures and refine the corresponding fabrication processes. Holotomography is utilized for the measurement of 3D refractive index tomograms of volume holographic gratings. This method offers precise quantification of refractive index distributions and the detection of defects within these gratings. It enables the evaluation of voids, debris, and the grating formation. This study underscores the potential of holotomography for both the analysis and fabrication of volume holographic gratings. image
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页数:8
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