Low-Permittivity and Low-Temperature Cofired BaSO4-BaF2 Microwave Dielectric Ceramics for High-Reliability Packaged Electronics

被引:26
作者
Wang, Wei [1 ,2 ]
Shehbaz, Muhammad [1 ,2 ]
Wang, Xin [1 ,2 ]
Du, Chao [1 ,2 ]
Xu, Diming [1 ,2 ]
Shi, Zhong-Qi [3 ]
Darwish, Moustafa Adel [4 ]
Qiu, Hong-Song [5 ]
Jin, Biao-Bing [5 ]
Zhou, Tao [6 ]
Chen, Ya-Wei [7 ]
Liang, Qi-Xin [7 ]
Zhang, Mei-Rong [7 ]
Zhou, Di [1 ,2 ]
机构
[1] Xi An Jiao Tong Univ, Key Lab Minist Educ, Sch Elect Sci & Engn, Elect Mat Res Lab, Xian 710049, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, Int Ctr Dielect Res, Sch Elect Sci & Engn, Xian 710049, Shaanxi, Peoples R China
[3] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Shaanxi, Peoples R China
[4] Tanta Univ, Fac Sci, Dept Chem, Tanta 31527, Egypt
[5] Nanjing Univ, Res Inst Supercond Elect RISE, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
[6] Hangzhou Dianzi Univ, Sch Elect & Informat Engn, Hangzhou 310018, Zhejiang, Peoples R China
[7] Shenzhen Microgate Technol Co Ltd, Shenzhen 518118, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
reliability; coefficientof thermal expansion; LTCC; microwave dielectricproperties; finite elementanalysis; SINGLE-CRYSTAL; RAMAN;
D O I
10.1021/acsami.3c13668
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In developing low-temperature cofired ceramic (LTCC) technology for high-density packaging or advanced packaged electronics, matching the coefficient of thermal expansion (CTE) among the packaged components is a critical challenge to improve reliability. The CTEs of solders and organic laminates are usually larger than 16.0 ppm of degrees C1-, while most low-permittivity (epsilon(r)) dielectric ceramics have CTEs of less than 10.0 ppm degrees C1-. Therefore, a good CTE match between organic laminates and dielectric ceramics is required for further LTCC applications. In this paper, we propose a high-CTE BaSO4-BaF2 LTCC as a potential solution for high-reliability packaged electronics. The BaSO4-BaF2 ceramics have the advantages of a wide low-temperature sintering range (650-850 degrees C), low loss, temperature stability, and Ag compatibility, ensuring excellent performance in LTCC technology. The 95 wt %BaSO4-5 wt %BaF2 ceramic has a epsilon(r) of 9.1, a Q x f of 40,100 GHz @11.03 GHz (Q = 1/tan delta), a temperature coefficient of the resonant frequency of -11.2 ppm degrees C1-, a CTE of +21.8 ppm degrees C1-, and a thermal conductivity of 1.3 W mK(-1) when sintered at 750 degrees C. Furthermore, a dielectric resonant antenna using BaSO4-BaF2 ceramics, a typically packaged component of LTCC and laminate, was designed and used to verify the excellent performance by a gain of 6.0 dBi at a central frequency of 8.97 GHz and a high radiation efficiency of 90% over a bandwidth of 760 MHz. Good match and low thermal stress were found in the packaged components of BaSO4-BaF2 ceramics, organic laminates, and Sn-based solders by finite element analysis, proving the potential of this LTCC for high-reliability packaged electronics.
引用
收藏
页码:51453 / 51461
页数:9
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