Origins of Fermi Level Pinning for Ni and Ag Metal Contacts on Tungsten Dichalcogenides

被引:13
作者
Wang, Xinglu [1 ]
Hu, Yaoqiao [1 ]
Kim, Seong Yeoul [1 ]
Addou, Rafik [1 ]
Cho, Kyeongjae [1 ]
Wallace, Robert M. [1 ]
机构
[1] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA
基金
美国国家科学基金会;
关键词
metal contact; transition metal dichalcogenides; Fermi level pinning; interface chemistry; bandalignment; imperfections; density functional theory; FIELD-EFFECT TRANSISTORS; GENERALIZED GRADIENT APPROXIMATION; INTERFACE CHEMISTRY; MOS2; TRANSISTORS; ULTRASOFT PSEUDOPOTENTIALS; TRANSPORT-PROPERTIES; MONOLAYER MOS2; 2D MATERIALS; TRANSITION; MOLYBDENUM;
D O I
10.1021/acsnano.3c06494
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Tungsten transition metal dichalcogenides (W-TMDs) are intriguing due to their properties and potential for application in next-generation electronic devices. However, strong Fermi level (E-F) pinning manifests at the metal/W-TMD interfaces, which could tremendously restrain the carrier injection into the channel. In this work, we illustrate the origins of E-F pinning for Ni and Ag contacts on W-TMDs by considering interface chemistry, band alignment, impurities, and imperfections of W-TMDs, contact metal adsorption mechanism, and the resultant electronic structure. We conclude that the origins of E-F pinning at a covalent contact metal/W-TMD interface, such as Ni/W-TMDs, can be attributed to defects, impurities, and interface reaction products. In contrast, for a van der Waals contact metal/TMD system such as Ag/W-TMDs, the primary factor responsible for E-F pinning is the electronic modification of the TMDs resulting from the defects and impurities with the minor impact of metal-induced gap states. The potential strategies for carefully engineering the metal deposition approach are also discussed. This work unveils the origins of E-F pinning at metal/TMD interfaces experimentally and theoretically and provides guidance on further enhancing and improving the device performance.
引用
收藏
页码:20353 / 20365
页数:13
相关论文
共 122 条
  • [1] Integration of 2D Materials for Advanced Devices: Challenges and Opportunities
    Addou, R.
    Wallace, R.
    [J]. 2017 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT 6), 2017, 79 (01): : 11 - 20
  • [2] Surface Analysis of WSe2 Crystals: Spatial and Electronic Variability
    Addou, Rafik
    Wallace, Robert M.
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (39) : 26400 - 26406
  • [3] Impurities and Electronic Property Variations of Natural MoS2 Crystal Surfaces
    Addou, Rafik
    McDonnell, Stephen
    Barrera, Diego
    Guo, Zaibing
    Azcatl, Angelica
    Wang, Jian
    Zhu, Hui
    Hinkle, Christopher L.
    Quevedo-Lopez, Manuel
    Alshareef, Husam N.
    Colombo, Luigi
    Hsu, Julia W. P.
    Wallace, Robert M.
    [J]. ACS NANO, 2015, 9 (09) : 9124 - 9133
  • [4] Surface Defects on Natural MoS2
    Addou, Rafik
    Colombo, Luigi
    Wallace, Robert M.
    [J]. ACS APPLIED MATERIALS & INTERFACES, 2015, 7 (22) : 11921 - 11929
  • [5] Two-dimensional flexible nanoelectronics
    Akinwande, Deji
    Petrone, Nicholas
    Hone, James
    [J]. NATURE COMMUNICATIONS, 2014, 5
  • [6] Improved Contacts and Device Performance in MoS2 Transistors Using a 2D Semiconductor Interlayer
    Andrews, Kraig
    Bowman, Arthur
    Rijal, Upendra
    Chen, Pai-Yen
    Zhou, Zhixian
    [J]. ACS NANO, 2020, 14 (05) : 6232 - 6241
  • [7] [Anonymous], 2016, E210816 ASTM, DOI [10.1520/E2108-16, DOI 10.1520/E2108-16]
  • [8] Perturbative perspectives on the chemical reaction prediction problem
    Ayers, PW
    Anderson, JSM
    Bartolotti, LJ
    [J]. INTERNATIONAL JOURNAL OF QUANTUM CHEMISTRY, 2005, 101 (05) : 520 - 534
  • [9] Covalent Nitrogen Doping and Compressive Strain in MoS2 by Remote N2 Plasma Exposure
    Azcatl, Angelica
    Qin, Xiaoye
    Prakash, Abhijith
    Zhang, Chenxi
    Cheng, Lanxia
    Wang, Qingxiao
    Lu, Ning
    Kim, Moon J.
    Kim, Jiyoung
    Cho, Kyeongjae
    Addou, Rafik
    Hinkle, Christopher L.
    Appenzeller, Joerg
    Wallace, Robert M.
    [J]. NANO LETTERS, 2016, 16 (09) : 5437 - 5443
  • [10] Bashir A., Chemistry of Nanomaterials, V51-87, P2020, DOI DOI 10.1016/B978-0-12-818908-5.00003-2