Solid phase epitaxy is a crystallization technique used to produce high-quality thin films. Lateral solid phase epitaxy furthermore enables the realization of nonplanar structures, which are interesting, e.g., in the field of spintronics. Here, we demonstrate lateral solid phase epitaxy of yttrium iron garnet over an artificial edge, such that the crystallization direction is perpendicular to the initial seed. We use single-crystalline garnet seed substrates partially covered by a SiOx film to study the lateral crystallization over the SiOx mesa. The yttrium iron garnet layer retains the crystal orientation of the substrate not only when in direct contact with the substrate but also across the edge on top of the SiOx mesa. By controlling the crystallization dynamics it is possible to almost completely suppress the formation of polycrystals and to enable epitaxial growth of single-crystalline yttrium iron garnet on top of mesas made from ceramic materials. From a series of annealing experiments, we extract an activation energy of 3.0eV and a velocity prefactor of 6.5 x 10(14)nm/s for the lateral epitaxial crystallization along the < 100 > direction. Our results pave the way to engineer single-crystalline nonplanar yttrium iron garnet structures with controlled crystal orientation.
机构:
Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Kim, Hyunho
Park, Sungeun
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Park, Sungeun
Ji, Kwang-Sun
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LG Elect, Energy & Environm Mat & Devices Team, Mat & Devices Adv Res Inst, 38 Baumoe Ro, Seoul 137724, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Ji, Kwang-Sun
Lee, Kyung Dong
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Lee, Kyung Dong
Kim, Seongtak
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Kim, Seongtak
Bae, Soohyun
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Bae, Soohyun
Ahn, Seh-Won
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LG Elect, Energy & Environm Mat & Devices Team, Mat & Devices Adv Res Inst, 38 Baumoe Ro, Seoul 137724, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Ahn, Seh-Won
Lee, Heon-Min
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LG Elect, Energy & Environm Mat & Devices Team, Mat & Devices Adv Res Inst, 38 Baumoe Ro, Seoul 137724, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Lee, Heon-Min
Kang, Yoonmook
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Korea Univ, Grad Sch Energy & Environm, KU KIST Green Sch, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Kang, Yoonmook
Lee, Hae-Seok
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
Lee, Hae-Seok
Kim, Donghwan
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Korea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South KoreaKorea Univ, Dept Mat Sci & Engn, 145 Anam Ro, Seoul 136713, South Korea
机构:
Univ Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Taira, Kenji
Hirose, Yasushi
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Univ Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Kanagawa Acad Sci & Technol, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Hirose, Yasushi
Nakao, Shoichiro
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Kanagawa Acad Sci & Technol, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Nakao, Shoichiro
Yamada, Naoomi
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Kanagawa Acad Sci & Technol, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Yamada, Naoomi
Kogure, Toshihiro
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Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan
Univ Tokyo, Grad Sch Sci, Dept Earth & Planetary Sci, Bunkyo Ku, Tokyo 1130033, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Kogure, Toshihiro
Shibata, Tatsuo
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Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan
Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Shibata, Tatsuo
Sasaki, Takayoshi
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Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan
Natl Inst Mat Sci, Tsukuba, Ibaraki 3050044, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Sasaki, Takayoshi
Hasegawa, Tetsuya
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Univ Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
Kanagawa Acad Sci & Technol, Takatsu Ku, Kawasaki, Kanagawa 2130012, Japan
Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, JapanUniv Tokyo, Grad Sch Sci, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
机构:
Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
IMEC, B-3001 Leuven, BelgiumUniv Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
Lieten, R. R.
Degroote, S.
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IMEC, B-3001 Leuven, BelgiumUniv Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
Degroote, S.
Clemente, F.
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IMEC, B-3001 Leuven, BelgiumUniv Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
Clemente, F.
Leys, M.
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IMEC, B-3001 Leuven, BelgiumUniv Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
Leys, M.
Borghs, G.
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IMEC, B-3001 Leuven, BelgiumUniv Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA