Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

被引:0
作者
Shi, Runzhou [1 ]
Liu, Huiwen [1 ]
Shao, Yuqi [1 ]
Bai, Jian [1 ]
机构
[1] Zhejiang Univ, State Key Lab Modrn Opt Instrumentat, Hangzhou 310027, Peoples R China
来源
OPTICAL DESIGN AND TESTING XIII | 2023年 / 12765卷
关键词
Ronchi lateral shearing interferometry; wavefront measurement; gradient descent; cross-iteration optimization; lithography projection lens;
D O I
10.1117/12.2688489
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Traditional phase retrieval methods for Ronchi lateral shearing interferometry eliminate the impact of high diffraction orders by increasing the number of phase-shifting interferograms, however, this introduces additional error in the phase-shifting process. We propose an optimization method combining a 2-frame phase-shifting algorithm to achieve accurate wavefront reconstruction. A numerical model matching the physical model is constructed and the cross-iterative gradient descent method is used to optimize the initial results obtained by the two-step phase-shifting method. The accuracy and robustness of the method are verified by simulations and experiments. The proposed method has the advantages of achieving high-precision wavefront reconstruction and correcting the phase-shifting errors, and it significantly simplifies the process of phase shift.
引用
收藏
页数:7
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