Slow-light-enhanced on-chip 1D and 2D photonic crystal waveguide gas sensing in near-IR with an ultrahigh interaction factor

Nanophotonic waveguides hold great promise to achieve chip-scale gas sensors. However, their performance is limited by a short light path and small light-analyte overlap. To address this challenge, silicon-based, slow-light enhanced gas-sensing techniques offer a promising approach. In this study, we experimentally investigated the slow light characteristics and gas-sensing performance of 1D and 2D photonic crystal waveguides (PCWs) in the near-IR (NIR) region. The proposed 2D PCW exhibited a high group index of up to 114, albeit with a high propagation loss. The limit of detection (LoD) for acetylene (C2H2) was 277 parts per million (ppm) for a 1 mm waveguide length and an averaging time of 0.4 s. The 1D PCW shows greater application potential compared to the 2D PCW waveguide, with an interaction factor reaching up to 288%, a comparably low propagation loss of 10 dB/cm, and an LoD of 706 ppm at 0.4 s. The measured group indices of the 2D and 1D waveguides are 104 and 16, respectively, which agree well with the simulation results. (c) 2023 Chinese Laser Press