[1] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 106, Taiwan
[2] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei 106, Taiwan
[3] Ming Chi Univ Technol, Dept Mat Engn, New Taipei City 243, Taiwan
[4] Ming Chi Univ Technol, Ctr Plasma & Thin Film Technol, New Taipei City 243, Taiwan
[5] INTI Int Univ, Fac Engn & Quant Surveying, Mech Engn Dept, Negeri Sembilan 71800, Malaysia
[6] Chang Gung Univ, Coll Engn, Ctr Green Technol, Taoyuan 333, Taiwan
[7] Chang Gung Univ, Ctr Green Technol, Taoyuan 333, Taiwan