Resolution of Virtual Depth Sectioning from Four-Dimensional Scanning Transmission Electron Microscopy

被引：5

作者：

Terzoudis-Lumsden, E. W. C. ^{[1
]}

Petersen, T. C. ^{[1
,2
]}

Brown, H. G. ^{[3
]}

Pelz, P. M. ^{[4
,5
]}

Ophus, C. ^{[6
]}

Findlay, S. D. ^{[1
]}

机构：

[1] Monash Univ, Sch Phys & Astron, Melbourne, Vic 3800, Australia

[2] Monash Univ, Monash Ctr Electron Microscopy, Melbourne, Vic 3800, Australia

[3] Univ Melbourne, Bio21 Mol Sci & Biotechnol Inst, Ian Holmes Imaging Ctr, Melbourne, Vic 3052, Australia

[4] Friedrich Alexander Univ Erlangen Nurnberg, Inst Microand Nanostruct Res, D-91058 Erlangen, Germany

[5] Friedrich Alexander Univ Erlangen Nurnberg, Ctr Nanoanal & Electron Microscopy, D-91058 Erlangen, Germany

[6] Lawrence Berkeley Natl Lab, Natl Ctr Electron Microscopy, Mol Foundry, Berkeley, CA 94720 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2023年 / 29卷 / 04期

基金：

澳大利亚研究理事会;

关键词：

depth sectioning; parallax; scattering matrix; 3D imaging; 4D-STEM; DIFFERENTIAL PHASE-CONTRAST; 2D MATERIALS; PTYCHOGRAPHY; STEM; RECONSTRUCTION; ATOMS;

D O I：

10.1093/micmic/ozad068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

One approach to three-dimensional structure determination using the wealth of scattering data in four-dimensional (4D) scanning transmission electron microscopy (STEM) is the parallax method proposed by Ophus et al. (2019. Advanced phase reconstruction methods enabled by 4D scanning transmission electron microscopy, Microsc Microanal 25, 10-11), which determines the scattering matrix and uses it to synthesize a virtual depth-sectioning reconstruction of the sample structure. Drawing on an equivalence with a hypothetical confocal imaging mode, we derive contrast transfer and point spread functions for this parallax method applied to weakly scattering objects, showing them identical to earlier depth-sectioning STEM modes when only bright field signal is used, but that improved depth resolution is possible if dark field signal can be used. Through a simulation-based study of doped Si, we show that this depth resolution is preserved for thicker samples, explore the impact of shot noise on the parallax reconstructions, discuss challenges to making use of dark field signal, and identify cases where the interpretation of the parallax reconstruction breaks down.

引用

页码：1409 / 1421

页数：13

共 56 条

[1] Quantitative Three-Dimensional Modeling of Zeotile Through Discrete Electron Tomography [J].

Bals, Sara ;

Batenburg, K. Joost ;

Liang, Duoduo ;

Lebedev, Oleg ;

Van Tendeloo, Gustaaf ;

Aerts, Alexander ;

Martens, Johan A. ;

Kirschhock, Christine E. A. .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2009, 131 (13) :4769-4773

[2]

Bangun A., 2022, IEEE T COMPUT IMAG

[3] Depth sectioning with the aberration-corrected scanning transmission electron microscope [J].

Borisevich, AY ;

Lupini, AR ;

Pennycook, SJ .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2006, 103 (09) :3044-3048

[4] Analysis of depth-sectioning STEM for thick samples and 3D imaging [J].

Bosch, Eric G. T. ;

Lazic, Ivan .

ULTRAMICROSCOPY, 2019, 207

[5] Structure Retrieval at Atomic Resolution in the Presence of Multiple Scattering of the Electron Probe [J].

Brown, H. G. ;

Chen, Z. ;

Weyland, M. ;

Ophus, C. ;

Ciston, J. ;

Allen, L. J. ;

Findlay, S. D. .

PHYSICAL REVIEW LETTERS, 2018, 121 (26)

[6] A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation [J].

Brown, Hamish G. ;

Pelz, Philipp M. ;

Hsu, Shang-Lin ;

Zhang, Zimeng ;

Ramesh, Ramamoorthy ;

Inzani, Katherine ;

Sheridan, Evan ;

Griffin, Sinead M. ;

Schloz, Marcel ;

Pekin, Thomas C. ;

Koch, Christoph T. ;

Findlay, Scott D. ;

Allen, Leslie J. ;

Scott, Mary C. ;

Ophus, Colin ;

Ciston, Jim .

MICROSCOPY AND MICROANALYSIS, 2022, 28 (05) :1632-1640

[7] 4D-STEM of Beam-Sensitive Materials [J].

Bustillo, Karen C. ;

Zeltmann, Steven E. ;

Chen, Min ;

Donohue, Jennifer ;

Ciston, Jim ;

Ophus, Colin ;

Minor, Andrew M. .

ACCOUNTS OF CHEMICAL RESEARCH, 2021, 54 (11) :2543-2551

[8] Electron ptychography achieves atomic-resolution limits set by lattice vibrations [J].

Chen, Zhen ;

Jiang, Yi ;

Shao, Yu-Tsun ;

Holtz, Megan E. ;

Odstrcil, Michal ;

Guizar-Sicairos, Manuel ;

Hanke, Isabelle ;

Ganschow, Steffen ;

Schlom, Darrell G. ;

Muller, David A. .

SCIENCE, 2021, 372 (6544) :826-+

[9] Towards quantitative, atomic-resolution reconstruction of the electrostatic potential via differential phase contrast using electrons [J].

Close, R. ;

Chen, Z. ;

Shibata, N. ;

Findlay, S. D. .

ULTRAMICROSCOPY, 2015, 159 :124-137

[10]

Cosgriff EC, 2008, ULTRAMICROSCOPY, V108, P1558, DOI 10.1016/j.ultramic.2008.05.009

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