Phase Deflectometry for Defect Detection of High Reflection Objects

被引:8
作者
Cheng, Xian-Ming [1 ]
Wang, Ting-Ting [1 ]
Zhu, Wen-Bin [1 ]
Shi, Bai-Di [1 ]
Chen, Wei [1 ]
机构
[1] Hohai Univ, Coll Mech & Elect Engn, Changzhou 213022, Peoples R China
基金
中国国家自然科学基金;
关键词
phase deflection; surface gradients; double surface; PARTIAL INTENSITY SATURATION;
D O I
10.3390/s23031607
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A method for detecting the surface defects of high reflection objects using phase deflection is proposed. The abrupt change in the surface gradient at the defect leads to the change in the fringe phase. Therefore, Gray code combined with a four-step phase-shift method was employed to obtain the surface gradients to characterize the defects. Then, through the double surface illumination model, the relationship between illumination intensity and phase was established. The causes of periodic error interference were analyzed, and the method of adjusting the fringe width to eliminate it was proposed. Finally, experimental results showed the effectiveness of the proposed method.
引用
收藏
页数:11
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