Over 100 μm thickness CVD diamond film with perfectly aligned nitrogen-vacancy centers on highly misoriented substrates

Thick CVD diamond film with perfectly aligned nitrogen-vacancy (NV) centers leads to highly sensitive quantum sensors. A misorientation angle (theta (mis)) of the (111) substrate is a key to determine the film thickness. We investigated the dependence of the growth rate and NV center properties on theta (mis)(0.4 degrees-9.9 degrees). The growth rate increased from 1.8 to 4.4 mu m h(-1) and the NV yield (=[NV centers]/[Nitrogen]) increased from 0.4% to 1.1% by increasing theta (mis). Finally, a diamond film of thickness approximate to 120 mu m with aligned NV centers was obtained with an area of 300 mu m x 400 mu m using theta (mis) of 9.9 degrees.