A MEMS-based Electric Field Sensor with Self-compensation for Sensitivity Drift

To reduce the sensitivity drift caused by working temperature and structural parameters change, an electric field sensor with self-compensation based on Micro-Electro-Mechanical System (MEMS) is proposed. The sensor structure includes the sensing electrodes for measuring the external electric field and the reference electrodes for monitoring the movable structure vibration. With the reference electrodes output, this sensor can track the resonant frequency automatically, and correct the sensing output in real time. Experimental results show that this sensor can achieve a linearity of 0.21% and an accuracy of 1.34% in the electric field range of -18 similar to+18 kV/m, and a less sensitivity drift within 3.0% in the temperature range of -40 degrees similar to 70 degrees, realizing a good self-compensation performance.