Pulse length selection in bipolar HiPIMS for high deposition rate of smooth, hard amorphous carbon films

被引：18

作者：

Ganesan, R. ^{[1
,2
]}

Fernandez-Martinez, I. ^{[3
]}

Akhavan, B. ^{[1
,4
,5
,6
]}

Matthews, D. T. A. ^{[8
]}

Sergachev, D. ^{[7
]}

Stueber, M. ^{[9
]}

McKenzie, D. R. ^{[1
]}

Bilek, M. M. M. ^{[1
,4
]}

机构：

[1] Univ Sydney, Sch Phys, Camperdown, NSW 2006, Australia

[2] Univ Illinois, Ctr Plasma Mat Interact, Dept Nucl Plasma & Radiol Engn, Urbana, IL 61801 USA

[3] Jose Gutierrez Abascal 2, Nano4Energy SL, Madrid 28006, Spain

[4] Univ Sydney, Sch Biomed Engn, Sydney, NSW 2006, Australia

[5] Univ Newcastle, Sch Engn, Callaghan, NSW 2308, Australia

[6] Hunter Med Res Inst HMRI, New Lambton Hts, NSW 2305, Australia

[7] Univ Twente, Fac Engn Technol, NL-7522 NB Enschede, Netherlands

[8] Feng Chia Univ, Dept Mat Sci & Engn, Taichung 407102, Taiwan

[9] Karlsruhe Inst Technol KIT, Inst Appl Mat IAM AWP, D-76344 Eggenstein Leopoldshafen, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2023年 / 454卷

关键词：

Amorphous carbon coatings; sp3; content; Diamond-like; HiPIMS; Sputtering; STRESS; ARC;

D O I：

10.1016/j.surfcoat.2022.129199

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Amorphous carbon films were deposited by bipolar HiPIMS, as a function of negative and positive voltage pulse lengths (50-175 mu s and 0-175 mu s respectively), using argon as sputter gas. The deposition rate, compressive stress, sp3 fraction and mechanical properties of the films were investigated and the results compared with those of amorphous carbon films deposited by conventional unipolar HiPIMS. We found minimum threshold positive and negative lengths are required in bipolar HiPIMS to enhance the sp3 fraction above 45 % and reduce the argon content. In addition to increasing the flux and energy of depositing ions by electrostatic control, bipolar HiPIMS also increases the flux ratio of depositing ions to sputter ions and thus reduces the probability of sputter gas incorporation into the growing amorphous carbon layers. Reduced argon content in the coatings correlates with high residual stress, high hardness and evidently enhanced tool cutting functionality.

引用

页数：9

共 37 条

[1] Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges [J].