Degradation mechanisms of annealed GaAsPBi films grown by molecular beam epitaxy

被引:1
|
作者
Himwas, C. [1 ]
Wongpinij, T. [2 ]
Kijamnajsuk, S. [3 ]
Euaruksakul, C. [2 ]
Photongkam, P. [2 ]
Tchernycheva, M. [4 ]
Pumee, W. [1 ]
Panyakeow, S. [1 ]
Kanjanachuchai, S. [1 ]
机构
[1] Chulalongkorn Univ, Fac Engn, Dept Elect Engn, Semicond Device Res Lab, 254 Phayathai Rd, Bangkok 10330, Thailand
[2] Minist Higher Educ Sci Res & Innovat, Publ Org, Synchrotron Light Res Inst, Nakhon Ratchasima 30000, Thailand
[3] Natl Met & Mat Technol Ctr, 114 Thailand Sci Pk,Phaholyothin Rd,Klong 1,Klong, Pathum Thani 12120, Thailand
[4] Univ Paris Saclay, Ctr Nanosci & Nanotechnol, UMR 9001, CNRS, 10 Blvd Thomas Gobert, F-91120 Palaiseau Cedex, France
关键词
Annealing; In situ LEEM observation; Surface degradation; Oxide desorption; Interfacial dislocation; Congruent sublimation; MORPHOLOGY;
D O I
10.1016/j.surfin.2023.103031
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
GaAsPBi is a novel semiconductor that can broaden the bandgap range of III-V compounds, but its growth on GaAs(001) by molecular beam epitaxy is complicated by the presence of Bi. To avoid the nucleation of Bi droplets, the growth temperature must be low (<400 & DEG;C), resulting in GaAsPBi films with poor photoluminescent yields. It is shown here that while post-growth annealing of GaAsPBi improves its optical quality, the GaAsPBi surface and the underlying GaAsPBi/GaAs interface undergo structural and chemical changes that limit the usefulness of annealing. Using synchrotron radiation-based spectromicroscopy, morphological and chemical changes on the surface are followed in situ, allowing the temperature limit to be estimated at -510 & DEG;C. Beyond this, the GaAsPBi film degrades, first by the nucleation of interfacial dislocations at -520 & DEG;C, then by the desorption of surface oxides at -580 & DEG;C, and by congruent sublimation of the film itself at -670 & DEG;C. The damages are spatially correlated and inhomogeneous, with areas above the dislocations being the preferential damage sites. These in situ observed events provide critical insights to the mechanisms and chronology of surface and interfacial degradation during high-temperature processing of GaAsPBi/GaAs structure, with implications for the process and device designs of heteroepitaxial III-V films prevalence in optoelectronics.
引用
收藏
页数:8
相关论文
共 50 条
  • [1] GaAsPBi epitaxial layer grown by molecular beam epitaxy
    Himwas, C.
    Soison, A.
    Kijamnajsuk, S.
    Wongpinij, T.
    Euaraksakul, C.
    Panyakeow, S.
    Kanjanachuchai, S.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2020, 35 (09)
  • [2] GaAs/GaAsPBi core-shell nanowires grown by molecular beam epitaxy
    Himwas, C.
    Yordsri, V
    Thanachayanont, C.
    Tchernycheva, M.
    Panyakeow, S.
    Kanjanachuchai, S.
    NANOTECHNOLOGY, 2022, 33 (09)
  • [3] Photoluminescence spectroscopy on annealed molecular beam epitaxy grown GaN
    Bell, A
    Harrison, I
    Korakakis, D
    Larkins, EC
    Hayes, JM
    Kuball, M
    Grandjean, N
    Massies, J
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (02) : 1070 - 1074
  • [4] Photoluminescence spectroscopy on annealed molecular beam epitaxy grown GaN
    1600, (American Institute of Physics Inc.):
  • [5] Mechanisms of nitrogen incorporation in (AlGa)(AsN) films grown by molecular beam epitaxy
    Cheng, TS
    Foxon, CT
    Jenkins, LC
    Hooper, SE
    Orton, JW
    Novikov, SV
    Popova, TB
    Tretyakov, VV
    JOURNAL OF CRYSTAL GROWTH, 1996, 158 (04) : 399 - 402
  • [6] Characteristics of BeTe films grown by molecular beam epitaxy
    Cho, MW
    Chang, JH
    Saeki, S
    Wang, SQ
    Yao, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (02): : 457 - 460
  • [7] Characterization of SnTe films grown by molecular beam epitaxy
    Mengui, UA
    Abramof, E
    Rappl, PHO
    Ueta, AY
    BRAZILIAN JOURNAL OF PHYSICS, 2006, 36 (2A) : 324 - 327
  • [8] Intrinsic defects in ZnO films grown by molecular beam epitaxy
    Tatsumi, T., 1600, Japan Society of Applied Physics (43):
  • [9] Intrinsic defects in ZnO films grown by molecular beam epitaxy
    Tatsumi, T
    Fujita, M
    Kawamoto, N
    Sasajima, M
    Horikoshi, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (5A): : 2602 - 2606
  • [10] Morphology of luminescent GaN films grown by molecular beam epitaxy
    TragerCowan, C
    ODonnell, KP
    Hooper, SE
    Foxon, CT
    APPLIED PHYSICS LETTERS, 1996, 68 (03) : 355 - 357