MICRO-TRANSFER PRINTING OF PHOTORESIST USING ADHESION-SWITCHABLE STAMP FOR PATTERNING UNCONVENTIONAL SURFACE

In this paper, we introduce a novel micro-transfer printing method for photoresist transfer. This approach utilizes the thermo-responsive adhesion modulation properties of a shape memory polymer (SMP) stamp, to facilitate the efficient transfer of patterned photoresist from a donor substrate to various unconventional receiver, such as water-soluble, stretchable, and curved surfaces, which typically present challenges in direct photolithography processes. Our study successfully demonstrates the effective transfer of various photoresists (PR), including AZ 5214E and SU-8 2010, onto diverse substrates, such as polyvinyl alcohol (PVA), silicone and curved glass substrates, highlighting the versatility of the technology. This technology paves the way for the development of advanced wearable electronics, biomedical sensors, and implantable medical devices, representing a progression in the high-resolution microfabrication of innovative electronics for a wide range of applications.