Quantum Dot Lasers Directly Grown on 300 mm Si Wafers: Planar and In-Pocket

被引：13

作者：

Feng, Kaiyin ^{[1
]}

Shang, Chen ^{[2
]}

Hughes, Eamonn ^{[2
]}

Clark, Andrew ^{[3
]}

Koscica, Rosalyn ^{[2
]}

Ludewig, Peter ^{[4
]}

Harame, David ^{[5
]}

Bowers, John ^{[1
,2
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

[2] Univ Calif Santa Barbara, Mat Dept, Santa Barbara, CA 93106 USA

[3] IQE Inc, Greensboro, NC 27409 USA

[4] NAsPIII V GmbH, D-35032 Marburg, Germany

[5] RF SUNY Polytech Inst, Albany, NY 12203 USA

来源：

PHOTONICS | 2023年 / 10卷 / 05期

关键词：

quantum dot laser; silicon photonics; photonic integration;

D O I：

10.3390/photonics10050534

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report for the first time the direct growth of quantum dot (QD) lasers with electrical pumping on 300 mm Si wafers on both a planar template and in-pocket template for in-plane photonic integration. O-band lasers with five QD layers were grown with molecular beam epitaxy (MBE) in a 300 mm reactor and then fabricated into standard Fabry-Perot ridge waveguide cavities. Edge-emitting lasers are demonstrated with high yield and reliable results ready for commercialization and scaled production, and efforts to make monolithically integrated lasing cavities grown on silicon-on-insulator (SOI) wafers vertically aligned and coupled to SiN waveguides on the same chip show the potential for 300 mm-scale Si photonic integration with in-pocket direct MBE growth.

引用

页数：11

共 40 条

[1] Pyramidal Structure Formation at the Interface between III/V Semiconductors and Silicon [J].

Beyer, Andreas ;

Stegmueller, Andreas ;

Oelerich, Jan O. ;

Jandieri, Kakhaber ;

Werner, Katharina ;

Mette, Gerson ;

Stolz, Wolfgang ;

Baranovskii, Sergei D. ;

Tonner, Ralf ;

Volz, Kerstin .

CHEMISTRY OF MATERIALS, 2016, 28 (10) :3265-3275

[2] Transfer Printing for Silicon Photonics [J].

Corbett, Brian ;

Loi, Ruggero ;

O'Callaghan, James ;

Roelkens, Gunther .

SILICON PHOTONICS, 2018, 99 :43-70

[3] High-Efficiency Quantum Dot Lasers as Comb Sources for DWDM Applications [J].

Dumont, Mario ;

Liu, Songtao ;

Kennedy, M. J. ;

Bowers, John .

APPLIED SCIENCES-BASEL, 2022, 12 (04)

[4] The AIM Photonics MPW: A Highly Accessible Cutting Edge Technology for Rapid Prototyping of Photonic Integrated Circuits [J].

Fahrenkopf, Nicholas M. ;

McDonough, Colin ;

Leake, Gerald L. ;

Su, Zhan ;

Timurdogan, Erman ;

Coolbaugh, Douglas D. .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2019, 25 (05)

[5] 1.6 Tbps Silicon Photonics Integrated Circuit and 800 Gbps Photonic Engine for Switch Co-Packaging Demonstration [J].

Fathololoumi, Saeed ;

Hui, David ;

Jadhav, Susheel ;

Chen, Jian ;

Nguyen, Kimchau ;

Sakib, M. N. ;

Li, Z. ;

Mahalingam, Hari ;

Amiralizadeh, Siamak ;

Tang, Nelson N. ;

Potluri, Harinadh ;

Montazeri, Mohammad ;

Frish, Harel ;

Defrees, Reece A. ;

Seibert, Christopher ;

Krichevsky, Alexander ;

Doylend, Jonathan K. ;

Heck, John ;

Venables, R. ;

Dahal, A. ;

Awujoola, A. ;

Vardapetyan, A. ;

Kaur, Guneet ;

Cen, Min ;

Kulkarni, Vishnu ;

Islam, Syed S. ;

Spreitzer, R. L. ;

Garag, S. ;

Alduino, A. C. ;

Chiou, R. K. ;

Kamyab, L. ;

Gupta, S. ;

Xie, B. ;

Appleton, R. S. ;

Hollingsworth, S. ;

McCargar, S. ;

Akulova, Y. ;

Brown, K. M. ;

Jones, R. ;

Zhu, Daniel ;

Liljeberg, Thomas ;

Liao, Ling .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2021, 39 (04) :1155-1161

[6] 300-mm Monolithic Silicon Photonics Foundry Technology [J].

Giewont, Ken ;

Nummy, Karen ;

Anderson, Frederick A. ;

Ayala, Javier ;

Barwicz, Tycoon ;

Bian, Yusheng ;

Dezfulian, Kevin K. ;

Gill, Douglas M. ;

Houghton, Thomas ;

Hu, Shuren ;

Peng, Bo ;

Rakowski, Michal ;

Rauch, Stewart, III ;

Rosenberg, Jessie C. ;

Sahin, Ash ;

Stobert, Ian ;

Stricker, Andy .

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2019, 25 (05)

[7] Recent advances in light sources on silicon [J].

Han, Yu ;

Park, Hyundai ;

Bowers, John ;

Lau, Kei May .

ADVANCES IN OPTICS AND PHOTONICS, 2022, 14 (03) :404-454

[8] Silicon fab-compatible contacts to n-InP and p-InGaAs for photonic applications [J].

Jain, S. ;

Sysak, M. ;

Swaidan, M. ;

Bowers, J. .

APPLIED PHYSICS LETTERS, 2012, 100 (20)

[9] Highly Reliable Low-Threshold InAs Quantum Dot Lasers on On-Axis (001) Si with 87% Injection Efficiency [J].

Jung, Daehwan ;

Zhang, Zeyu ;

Norman, Justin ;

Herrick, Robert ;

Kennedy, M. J. ;

Patel, Pari ;

Turnlund, Katherine ;

Jan, Catherine ;

Wan, Yating ;

Gossard, Arthur C. ;

Bowers, John E. .

ACS PHOTONICS, 2018, 5 (03) :1094-1100

[10] Degradation-robust single mode continuous wave operation of 1.46 μm metamorphic quantum dot lasers on GaAs substrate [J].

Kettler, T. ;

Karachinsky, L. Ya. ;

Ledentsov, N. N. ;

Shchukin, V. A. ;

Fiol, G. ;

Kuntz, M. ;

Lochmann, A. ;

Schulz, O. ;

Reissmann, L. ;

Posilovic, K. ;

Bimberg, D. ;

Novikov, I. I. ;

Shernyakov, Yu. M. ;

Gordeev, N. Yu. ;

Maximov, M. V. ;

Kryzhanovskaya, N. V. ;

Zhukov, A. E. ;

Semenova, E. S. ;

Vasil'ev, A. P. ;

Ustinov, V. M. ;

Kovsh, A. R. .

APPLIED PHYSICS LETTERS, 2006, 89 (04)

← 1 2 3 4 →