Novel Method for the Preparation of Lamellas From Porous and Brittle Materials for In Situ TEM Heating/Biasing

被引：0

作者：

Zorro, Fatima ^{[1
,2
]}

Carbo-Argibay, Enrique ^{[2
]}

Ferreira, Paulo J. ^{[1
,2
,3
]}

机构：

[1] Inst Super Tecn, Mech Engn Dept, IDMEC, Av Rovisco Pais 1, P-1049001 Lisbon, Portugal

[2] INL Int Iberian Nanotechnol Lab, Av Mestre Jose Veiga, P-4715330 Braga, Portugal

[3] Univ Texas Austin, Mat Sci & Engn Program, 204 E Dean Keeton St, Austin, TX 78712 USA

来源：

MICROSCOPY AND MICROANALYSIS | 2024年 / 30卷 / 01期

关键词：

FIB/SEM; in situ TEM; lamella transfer; MEMS chip; porous material; ELECTRON-MICROSCOPY; BEAM; SPECIMEN;

D O I：

10.1093/micmic/ozad141

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel method for the preparation of lamellas made from porous and brittle compressed green powder using a focused ion beam (FIB) is described. One of the main purposes for the development of this methodology is to use this type of samples in micro-electromechanical systems (MEMS) chips for in situ transmission electron microscopy heating/biasing experiments, concomitant with maintaining the mechanical integrity and the absence of contamination of samples. This is accomplished through a modification of the standard FIB procedure for the preparation of lamellas, the adaptation of conventional chips, as well as the specific transfer of the lamella onto the chips. This method is versatile enough to be implemented in most commercially available FIB systems and MEMS chips.

引用

页码：41 / 48

页数：8

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