TOWARDS A GAS INDEPENDENT THERMAL FLOW METER

被引：0

作者：

Kenari, Shirin Azadi ^{[1
]}

Wiegerink, Remco J. ^{[1
]}

Sanders, Remco G. P. ^{[1
]}

Lotters, Joost C. ^{[1
,2
]}

机构：

[1] Univ Twente, Enschede, Netherlands

[2] Bronkhorst High Tech BV, Ruurlo, Netherlands

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Thermal flow sensor; thermal conductivity; calorimetric sensor; Wheatstone bridge;

D O I：

10.1109/MEMS49605.2023.10052491

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel potentially gas-independent thermal flow sensor chip that contains three two-wire calorimetric flow sensors to measure the flow profile and flow direction inside a tube, and a single-wire flow(i)ndependent thermal conductivity sensor which detects the type of the gas through a simple DC voltage measurement. All wires have the same dimensions of 2000 mu m in length, 5 mu m in width and 1.2 mu m in thickness. Four different gases Ar, N-2, Ne and He were used for the thermal conductivity measurement and the measured output voltage corresponds very well with a theoretical model.

引用

页码：767 / 770

页数：4

共 7 条

[1] Thermal Flow Sensors for Harsh Environments [J].