Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform

被引：1

作者：

Gow, Paul C. ^{[1
]}

Churchill, Glenn M. ^{[1
]}

Vitali, Valerio ^{[1
]}

Bucio, Thalia Dominguez ^{[1
]}

Gardes, Frederic Y. ^{[1
]}

D'Souza, Matthew P. ^{[1
]}

Petropoulos, Periklis ^{[1
]}

Gawith, Corin B. E. ^{[1
]}

Gates, James C. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton, Hampshire, England

来源：

ELECTRONICS LETTERS | 2024年 / 60卷 / 05期

基金：

“创新英国”项目; 英国工程与自然科学研究理事会;

关键词：

micromachining; optical fabrication; photonics; sawing machines; surface roughness; waveguides; ROUGHNESS;

D O I：

10.1049/ell2.13138

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported. The authors report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. This technique was extended to fabricate ridge waveguides. image

引用

页数：3

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