A combined MEMS thermal vacuum sensor with a wide pressure range

被引：6

作者：

Yuan, Chuang ^{[1
]}

Fu, Jianyu ^{[1
,2
,3
]}

Qu, Fan ^{[1
]}

Zhou, Qiong ^{[1
]}

机构：

[1] Univ Chinese Acad Sci, Sch Integrated Circuits, Beijing 100049, Peoples R China

[2] Chinese Acad Sci, Inst Microelect, IoT Technol R&D Lab, Beijing 100029, Peoples R China

[3] Wuxi IOT Innovat Ctr Co Ltd, Wuxi 214135, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2024年 / 34卷 / 01期

基金：

中国国家自然科学基金;

关键词：

MEMS thermal vacuum sensor; pressure range; diode-type; GAUGES;

D O I：

10.1088/1361-6439/ad104d

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 x 10-3 to 3 x 104 Pa and from 1.7 x 10-2 to 4.4 x 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 x 10-3 to 6.9 x 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 x 300 mu m2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

引用

页数：9

共 30 条

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