Proposal of Low-Loss Non-Volatile Mid-Infrared Optical Phase Shifter Based on Ge2Sb2Te3S2

被引：16

作者：

Miyatake, Yuto ^{[1
]}

Makino, Kotaro ^{[2
]}

Tominaga, Junji ^{[2
]}

Miyata, Noriyuki ^{[2
]}

Nakano, Takashi ^{[2
]}

Okano, Makoto ^{[2
]}

Toprasertpong, Kasidit ^{[1
]}

Takagi, Shinichi ^{[1
]}

Takenaka, Mitsuru ^{[1
]}

机构：

[1] Univ Tokyo, Dept Elect Engn & Informat Syst, Tokyo 1130032, Japan

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba 3058568, Japan

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2023年 / 70卷 / 04期

基金：

日本科学技术振兴机构; 日本学术振兴会;

关键词：

Phase shifters; Phase change materials; Optical variables control; Optical refraction; Optical losses; Silicon; Photonic band gap; Mid-infrared (MIR); non-volatile; phase-change material (PCM); phase shifter; CIRCUITS;

D O I：

10.1109/TED.2023.3235865

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An optical phase shifter based on phase-change materials (PCMs) is a promising building block of quantum photonic integrated circuits (QPICs) operating at mid-infrared (MIR) wavelengths on a Si photonics platform. In this article, we propose a record low-loss non-volatile PCM phase shifter operating at MIR wavelengths based on Ge2Sb2Te3S2 (GSTS), which is a new Se-free widegap PCM. On the basis of the refractive index and extinction coefficient spectra measured by spectroscopic ellipsome-try, we show that GSTS has excellent material properties for optical phase shifters. By using GSTS in the MIR range, the optical absorption of a PCM phase shifter can be consider-ably reduced. We achieved an optical loss of 0.29 dB for a pi phase shift, which is the lowest loss ever reported for a PCM phase shifter integrated with a Si waveguide. We also demonstrate the non-volatile resonance wavelength tuning of a microring resonator (MRR) with a GSTS phase shifter and the optically induced phase transition of a GSTS phase shifter based on laser irradiation.

引用

页码：2106 / 2112

页数：7