In situ TEM study from the perspective of holders

被引:5
作者
Yaguchi, Toshie [1 ]
Gabriel, Mia L. San [2 ]
Hashimoto, Ayako [3 ,4 ]
Howe, Jane Y. [2 ,5 ]
机构
[1] Hitachi High Tech Corp, Electron Microscope Syst Design Dept, 552-53 Shinko Cho, Hitachinaka, Ibaraki 3128504, Japan
[2] Univ Toronto, Dept Mat Sci & Engn, 184 College St, Toronto, ON M5S 3E4, Canada
[3] Natl Inst Mat Sci, In Situ Electron Microscopy Tech Dev Grp, 1-2-1 Sengen, Tsukuba 3050047, Japan
[4] Univ Tsukuba, Degree Programs Pure & Appl Sci, 1-2-1 Sengen, Tsukuba 3058577, Japan
[5] Univ Toronto, Dept Chem Engn & Appl Chem, 200 Coll St, Toronto, ON M5S 3H6, Canada
基金
加拿大自然科学与工程研究理事会; 日本科学技术振兴机构; 日本学术振兴会;
关键词
in situ transmission electron microscopy; differential pumping; closed (sealed) gas cell; environmental cell; MEM; ETEM; TRANSMISSION ELECTRON-MICROSCOPY; HIGH-TEMPERATURE; ENVIRONMENTAL CELL; HEATING HOLDER; MICROHEATER; SYSTEM; STABILITY; SILICON; GROWTH; OPTIMIZATION;
D O I
10.1093/jmicro/dfad055
中图分类号
TH742 [显微镜];
学科分类号
摘要
During the in situ transmission electron microscopy (TEM) observations, the diverse functionalities of different specimen holders play a crucial role. We hereby provide a comprehensive overview of the main types of holders, associated technologies and case studies pertaining to the widely employed heating and gas heating methods, from their initial developments to the latest advancement. In addition to the conventional approaches, we also discuss the emergence of holders that incorporate a micro-electro-mechanical system (MEMS) chip for in situ observations. The MEMS technology offers a multitude of functions within a single chip, thereby enhancing the capabilities and versatility of the holders. MEMS chips have been utilized in environmental-cell designs, enabling customized fabrication of diverse shapes. This innovation has facilitated their application in conducting in situ observations within gas and liquid environments, particularly in the investigation of catalytic and battery reactions. We summarize recent noteworthy studies conducted using in situ liquid TEM. These studies highlight significant advancements and provide valuable insights into the utilization of MEMS chips in environmental-cells, as well as the expanding capabilities of in situ liquid TEM in various research domains.
引用
收藏
页码:117 / 132
页数:16
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