Use of electrical measurements for non-invasive estimation of plasma electron density in the inductively coupled SPIDER ion source

被引:3
|
作者
Jain, Palak [1 ]
Recchia, Mauro [1 ,2 ]
Sartori, Emanuele [1 ,3 ]
Serianni, Gianluigi [1 ,2 ]
Poggi, Carlo [1 ]
Ugoletti, Margherita [1 ]
Zaniol, Barbara [1 ]
机构
[1] Univ Padua, Consorzio RFX, CNR, ENEA,INFN,Acciaierie Venete SpA, Corso Stati Uniti 4, I-35127 Padua, Italy
[2] CNR ISTP Padova, Padua, Italy
[3] Univ Padua, Via 8 Febbraio 1848,2, I-35122 Padua, Italy
关键词
plasma electron density; driver equivalent impedance; inductively coupled plasma;
D O I
10.1088/1361-6587/acd8ed
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
SPIDER (source for the production of ions of deuterium extracted from RF plasma) is the full-scale prototype of the ITER neutral beam injector ion source. The plasma heating takes place inside eight drivers via inductive coupling, through the radiofrequency (RF) coil. To achieve optimum conditions during source operation it is necessary to know the plasma behavior under various operational conditions. One of the essential parameters is the plasma electron density. It is possible to experimentally measure this parameter and, currently, different methods are being explored, such as the estimations coming from a Langmuir probe and optical emission spectroscopy. However, these methods are either available for temporary measurements or require dedicated analyses with large uncertainties. In this regard, alternative, reliable, and fast diagnostic tools will be beneficial for the estimation of the order of magnitude of electron density inside the driver. Two models for the estimation of electron density are recalled, discussed, and further modified in this work: one is based on the classical power balance equation, and the other is recently described in the literature and relies on classical plasma conductivity. Both models use equivalent electrical parameters of the driver derived from available electrical measurements at the output of the RF generator and through the knowledge of the matching network and the transmission line length. This work explicitly focuses on the application of these models to estimate the plasma electron density in a single driver of SPIDER. Furthermore, the estimations are compared with the first experimental results obtained from temporary electrostatic probe measurements and are found to be in good agreement in terms of magnitude and trends.
引用
收藏
页数:13
相关论文
共 47 条
  • [1] EXCITATION TEMPERATURE AND ELECTRON NUMBER DENSITY-MEASUREMENTS IN AN INDUCTIVELY-COUPLED PLASMA SOURCE
    MURTY, PS
    RAO, SVNB
    BISWAS, SS
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1993, 31 (11) : 804 - 807
  • [2] Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source
    Kim, Young-Cheol
    Kim, Yu-Sin
    Lee, Hyo-Chang
    Moon, Jun-Hyeon
    Chung, Chin-Wook
    Kim, Yunjung
    Cho, Guangsup
    PHYSICS OF PLASMAS, 2015, 22 (08)
  • [3] Feedback control of plasma electron density and ion energy in an inductively coupled plasma etcher
    Lin, Chaung
    Leou, Keh-Chyang
    Huang, Hong-Min
    Hsieh, Cheng-Hung
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (01): : 157 - 164
  • [4] Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma
    Hori, T
    Bowden, MD
    Uchino, K
    Muraoka, K
    Maeda, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (01): : 144 - 151
  • [5] Electron density measurements on an inductively coupled plasma with a one-port microwave interferometer
    Andrasch, M.
    Ehlbeck, J.
    Foest, R.
    Weltmann, K-D
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (05):
  • [6] Improvements in the angular current density of inductively coupled plasma ion source for focused heavy ion beams
    Menon, Ranjini
    Nabhiraj, P. Y.
    Bhandari, R. K.
    VACUUM, 2013, 97 : 71 - 74
  • [7] Measurements of Ti atom density and Ti ion density in inductively coupled plasma enhanced magnetron sputtering
    Nakamura, Tadashi
    Okimura, Kunio
    Shinku/Journal of the Vacuum Society of Japan, 2003, 46 (05) : 462 - 465
  • [8] A SIMPLE, NON-INVASIVE METHOD FOR THE MEASUREMENT OF GAS-FLOW VELOCITIES IN THE INDUCTIVELY COUPLED PLASMA
    CICERONE, MT
    FARNSWORTH, PB
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1989, 44 (09) : 897 - 907
  • [9] Optical measurements of ion density in the second vacuum stage of an inductively coupled plasma mass spectrometer
    Duersch, BS
    Chen, YB
    Ciocan, A
    Farnsworth, PB
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1998, 53 (04) : 569 - 579
  • [10] Spatially resolved measurements of ion density behind the skimmer of an inductively coupled plasma mass spectrometer
    Chen, XS
    Houk, RS
    SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1996, 51 (01) : 41 - 54