Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture

被引:4
作者
Bhotkar, Ketan [1 ]
Yu, Yi Yin [1 ]
Sawant, Jaydip [1 ]
Patil, Ravindra [1 ]
Park, Kyu Chang [1 ]
机构
[1] Kyung Hee Univ, Dept Informat Display, Seoul 02247, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2023年 / 41卷 / 02期
关键词
FIELD-EMISSION; EMITTERS; FABRICATION;
D O I
10.1116/6.0002285
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article discusses the development of a cold cathode electron beam (C-beam) based on vertically aligned carbon nanotubes (VACNTs) and the optimization of field emission (FE) from C-beam architecture design. The characteristics of the electron beam are typically required to match the applications of interest. To study the FE, five distinct multi-array emitter island designs, viz., 65 x 65, 75 x 75, 90 x 90, 100 x 100, and 240 x 240 mu m(2), were fabricated. The island 240 x 240 mu m(2) (single island) was divided into a group of four subislands each with dimensions 65 x 65, 75 x 75, 90 x 90, and 100 x 100 mu m(2). We explored the field-screening effect of these different island designs using experiments and modeling, and we discovered that the size of the island had a significant impact on the FE properties. Moreover, we found that the island's size significantly affected its I-V properties, with a 75 x 75 mu m(2) island offering 0.7 mA anode current the best emission current among other islands. Additionally, tungsten cross wire (EN 12543-5), a typical resolution testing object, had its focal spot size (FSS) measured using x-ray imaging, and the lowest FSS of 0.45 and 0.49 mm in both vertical and horizontal directions was obtained. This innovative method has a great deal of promise for developing the next generation of VACNT-based electron sources.
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页数:11
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共 33 条
  • [1] Adhikari B. C., 2022, NANOMATERIALS-BASEL, V12, P4313, DOI [10.3390/nano12234313, DOI 10.3390/NANO12234313]
  • [2] The screening effects of carbon nanotube arrays and its field emission optimum density
    Cai, Dan
    Liu, Lie
    [J]. AIP ADVANCES, 2013, 3 (12)
  • [3] Screening effects on field emission from arrays of (5,5) carbon nanotubes: Quantum mechanical simulations
    Chen, Guihua
    Wang, Weiliang
    Peng, Jie
    He, Chunshan
    Deng, Shaozhi
    Xu, Ningsheng
    Li, Zhibing
    [J]. PHYSICAL REVIEW B, 2007, 76 (19)
  • [4] Field emission from optimized structure of carbon nanotube field emitter array
    Chouhan, V.
    Noguchi, T.
    Kato, S.
    [J]. JOURNAL OF APPLIED PHYSICS, 2016, 119 (13)
  • [5] Screening effects between field-enhancing patterned carbon nanotubes: A numerical study
    Dionne, Martin
    Coulombe, Sylvain
    Meunier, Jean-Luc
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (06) : 1298 - 1305
  • [6] Dyke W. P., 1956, Advances in Electronics and Electron Physics, V8, P89, DOI DOI 10.1016/S0065-2539(08)61226-3
  • [7] Direct Synthesis of Carbon Nanotube Field Emitters on Metal Substrate for Open-Type X-ray Source in Medical Imaging
    Gupta, Amar Prasad
    Park, Sangjun
    Yeo, Seung Jun
    Jung, Jaeik
    Cho, Chonggil
    Paik, Sang Hyun
    Park, Hunkuk
    Cho, Young Chul
    Kim, Seung Hoon
    Shin, Ji Hoon
    Ahn, Jeung Sun
    Ryu, Jehwang
    [J]. MATERIALS, 2017, 10 (08):
  • [8] Tailoring the electrostatic screening effect during field emission from hollow multiwalled carbon nanotube pillars
    Hazra, Kiran Shankar
    Gigras, Tanuj
    Misra, D. S.
    [J]. APPLIED PHYSICS LETTERS, 2011, 98 (12)
  • [9] Fabrication of Stable Carbon Nanotube Cold Cathode Electron Emitters with Post-Growth Electrical Aging
    Kim, Jung Hyun
    Kang, Jung Su
    Park, Kyu Chang
    [J]. MICROMACHINES, 2018, 9 (12):
  • [10] Suppressed Field Emission Screening Effect and Electric Field Simulation of Carbon Nanotube-Based Triode Field Emitters
    Koohsorkhi, Javad
    Davoudzadeh, Nima
    Mohajerzadeh, Shamsoddin
    Soleimani, Asl Ebrahin
    Fard, Ghafouri Hasan
    [J]. SMART MATERIALS FOR SMART DEVICES AND STRUCTURES, 2009, 154 : 83 - +