Growth of non-polar m-plane GaN pseudo-substrates by Molecular beam epitaxy

被引:3
作者
Fernando-Saavedra, Amalia [1 ,2 ]
Albert, Steven [1 ,2 ]
Bengoechea-Encabo, Ana [1 ,2 ]
Trampert, Achim [3 ]
Xie, Mengyao [4 ]
Sanchez-Garcia, Miguel A. [1 ,2 ]
Calleja, Enrique [1 ,2 ]
机构
[1] Univ Politecn Madrid, ISOM, Ave Complutense 30,Ciudad Univ, Madrid 28040, Spain
[2] Univ Politecn Madrid, Dept Ingn Elect, ETSI Telecomunicac, Ave Complutense 30,Ciudad Univ, Madrid 28040, Spain
[3] Paul Drude Inst Festkoperelektron, Hausvogteipl 5-7, D-10117 Berlin, Germany
[4] Tianrui Semicond Mat Suzhou Ltd Co, Third Zone Datong Rd 20, Suzhou 215151, Peoples R China
关键词
A1; Etching; A3; Molecular beam epitaxy; Selective epitaxy; B1; Nitrides; B2; Semiconducting III -V materials; SELECTIVE-AREA GROWTH; NANOCOLUMNS; LAYERS;
D O I
10.1016/j.jcrysgro.2023.127272
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Non-polar m-plane GaN films were grown by Plasma Assisted Molecular Beam Epitaxy on & gamma;-LiAlO2 (100) sub-strates by a controlled coalescence of GaN nanocolumns obtained by a two-step process including a top-down nanopillars etching from a GaN buffer and a subsequent bottom-up overgrowth. Transmission electron micro-scopy data show a significant reduction of extended defects density in the coalesced film as compared to the initial GaN buffer, most likely due to a filter effect by the regrowth process on the nanopillars inclined walls. Low temperature photoluminescence spectra back this reduction by a strong intensity decrease of the stacking faults fingerprint emission peaks, while a very intense donor-bound excitonic emission at 3.472 eV, 2.8 meV wide, becomes dominant.
引用
收藏
页数:6
相关论文
共 50 条
  • [21] Mechanism for spontaneous growth of GaN nanowires with molecular beam epitaxy
    Bertness, K. A.
    Roshko, A.
    Mansfield, L. M.
    Harvey, T. E.
    Sanford, N. A.
    JOURNAL OF CRYSTAL GROWTH, 2008, 310 (13) : 3154 - 3158
  • [22] Characterization of M-plane GaN film grown on β-LiGaO2 (100) by plasma-assisted molecular beam epitaxy
    Shih, Cheng-Hung
    Lo, Ikai
    Pang, Wen-Yuan
    Wang, Ying-Chieh
    Chou, Mitch M. C.
    THIN SOLID FILMS, 2011, 519 (11) : 3569 - 3572
  • [23] Structural and optical properties of non-polar A-plane ZnO films grown on R-plane sapphire substrates by plasma-assisted molecular-beam epitaxy
    Han, S. K.
    Hong, S. K.
    Lee, J. W.
    Lee, J. Y.
    Song, J. H.
    Nam, Y. S.
    Chang, S. K.
    Minegishi, T.
    Yao, T.
    JOURNAL OF CRYSTAL GROWTH, 2007, 309 (02) : 121 - 127
  • [24] Arsenic incorporation in GaN during growth by molecular beam epitaxy
    Foxon, CT
    Novikov, SV
    Li, T
    Campion, RP
    Winser, AJ
    Harrison, I
    Kappers, MJ
    Humphreys, CJ
    JOURNAL OF CRYSTAL GROWTH, 2003, 251 (1-4) : 510 - 514
  • [25] Effect of Na contents on fabrication of p-type non-polar m-plane ZnO films
    Pan, X. H.
    Zhou, Y. S.
    Chen, S. S.
    Ding, P.
    Lu, B.
    Huang, J. Y.
    Ye, Z. Z.
    JOURNAL OF CRYSTAL GROWTH, 2014, 404 : 54 - 58
  • [26] Effect of m-plane GaN substrate miscut on InGaN/GaN quantum well growth
    Lai, K. Y.
    Paskova, T.
    Wheeler, V. D.
    Grenko, J. A.
    Johnson, M. A. L.
    Udwary, K.
    Preble, E. A.
    Evans, K. R.
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (07) : 902 - 905
  • [27] Effect of additional hydrochloric acid flow on the growth of non-polar a-plane GaN layers on r-plane sapphire by hydride vapor-phase epitaxy
    Lee, Moonsang
    Mikulik, Dmitry
    Park, Sungsoo
    Im, Kyuhyun
    Cho, Seong-Ho
    Ko, Dongsu
    Kim, Un Jeong
    Hwang, Sungwoo
    Yoon, Euijoon
    JOURNAL OF CRYSTAL GROWTH, 2014, 404 : 199 - 203
  • [28] Development of m-plane GaN anisotropic film properties during MOVPE growth on LiAlO2 substrates
    Mauder, C.
    Reuters, B.
    Khoshroo, L. Rahimzadeh
    Rzheutskii, M. V.
    Lutsenko, E. V.
    Yablonskii, G. P.
    Woitok, J. F.
    Heuken, M.
    Kalisch, H.
    Jansen, R. H.
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (11) : 1823 - 1827
  • [29] MBE growth and characterization of ZnTe epilayers on m-plane sapphire substrates
    Nakasu, Taizo
    Sun, Wei-Che
    Yamashita, Sotaro
    Aiba, Takayuki
    Taguri, Kosuke
    Kobayashi, Masakazu
    Asahi, Toshiaki
    Togo, Hiroyoshi
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 11, NO 7-8, 2014, 11 (7-8): : 1182 - 1185
  • [30] Critical issues for homoepitaxial GaN growth by molecular beam epitaxy on hydride vapor-phase epitaxy-grown GaN substrates
    Storm, D. F.
    Hardy, M. T.
    Katzer, D. S.
    Nepal, N.
    Downey, B. P.
    Meyer, D. J.
    McConkie, Thomas O.
    Zhou, Lin
    Smith, David J.
    JOURNAL OF CRYSTAL GROWTH, 2016, 456 : 121 - 132