High-Temperature Fiber-Optic Fabry-Perot Vibration Sensor Based on Single-Crystal Sapphire

被引：8

作者：

Liu, Hua ^{[1
]}

Jia, Pinggang ^{[1
]}

Su, Chengxin ^{[1
]}

Zhao, Aihao ^{[1
]}

Liu, Jia ^{[1
]}

Ren, Qianyu ^{[1
]}

Xiong, Jijun ^{[1
]}

机构：

[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China

来源：

SENSORS | 2023年 / 23卷 / 10期

基金：

中国国家自然科学基金; 美国国家科学基金会;

关键词：

fiber-optic sensor; Fabry-Perot; high-temperature applications; vibration measurement; single-crystal sapphire; DEMODULATION TECHNIQUE; ACCELEROMETER; CAVITY; SYSTEM;

D O I：

10.3390/s23104952

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, a fiber-optic Fabry-Perot (F-P) vibration sensor that can work at 800 ? is proposed. The F-P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 ?. The nonlinearity was evaluated from 20 ? to 800 ? with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the x-axis and y-axis. The vibration sensor will have wide high-temperature engineering-application prospects.

引用

页数：10

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