Enhanced sensitivity towards hydrogen by a TiN interlayer in Pd-decorated SnO2 nanowires

被引:16
作者
Badie, Clemence [1 ]
Lee, Jae-Hyoung [2 ]
Mirzaei, Ali [3 ]
Kim, Hyoun Woo [4 ]
Sayegh, Syreina [5 ]
Bechelany, Mikhael [5 ,6 ]
Santinacci, Lionel [1 ]
Kim, Sang Sub [7 ]
机构
[1] Aix Marseille Univ, CNRS, CINaM, Marseille, France
[2] Korea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 02792, South Korea
[3] Shiraz Univ Technol, Dept Mat Sci & Engn, Shiraz 71555713876, Iran
[4] Hanyang Univ, Div Mat Sci & Engn, Seoul 04763, South Korea
[5] Univ Montpellier, Inst Europeen Membranes, CNRS, IEM,UMR 5635,ENSCM, Pl Eugene Bataillon, F-34095 Montpellier, France
[6] Gulf Univ Sci & Technol, GUST, Kuwait, Kuwait
[7] Inha Univ, Dept Mat Sci & Engn, Incheon 22212, South Korea
基金
新加坡国家研究基金会;
关键词
ATOMIC LAYER DEPOSITION; METAL-OXIDE NANOSTRUCTURES; GAS SENSORS; TITANIUM NITRIDE; SENSING PROPERTIES; FILMS; H-2; NANOPARTICLES; ENERGY; SEMICONDUCTOR;
D O I
10.1039/d3ta00020f
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this study, we designed a new structure based on Pd-decorated TiN-coated SnO2 nanowires (NWs) for the selective detection of H-2 gas. Initially, SnO2 NWs were prepared by a simple vapor-liquid-solid growth method. Then, atomic layer deposition (ALD) was used to grow a continuous TiN layer and, subsequently, Pd nanoparticles on the NW networks. The TiN thickness was precisely set to 0.5, 1, 2, and 5 nm, while the Pd loading was adjusted by varying the number of ALD cycles (25 to 200 cycles). Various characterization techniques revealed the amorphous nature of TiN, a homogeneous dispersion of Pd NPs and the uniform morphology and single crystallinity of the SnO2 NWs. H-2 gas sensing studies revealed that the sensor with a TiN thickness of 1 nm exhibited the highest response. Pd decoration further improved the response to H-2 gas. Hence, the Pd-decorated gas sensor with a 1 nm-thick TiN layer showed the highest H-2 sensing performance at 250 degrees C among all gas sensors. Due to the unique chemical reaction between Pd and hydrogen, the fabricated sensor shows excellent performance in detecting hydrogen gas. The underlying sensing mechanism is discussed in detail. The optimized sensor has a sensitivity of 8.18 for hydrogen gas, which is four times higher than that of other gas species, showing that it is suitable for detecting hydrogen gas. We believe that this new design is a highly valuable gas sensor for the real application of H-2 monitoring with high selectivity.
引用
收藏
页码:12202 / 12213
页数:12
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