Simple route for high-throughput fabrication of metasurfaces using one-step UV-curable resin printing

被引:5
作者
Gong, Jintao [1 ,2 ]
Xiong, Lingxing [1 ,3 ]
Pu, Mingbo [1 ,4 ]
Guo, Yinghui [1 ,4 ]
Wen, Yifeng [1 ,4 ]
He, Qiong [1 ]
Li, Xiong [1 ,4 ]
Ma, Xiaoliang [1 ,4 ]
Luo, Xiangang [1 ,4 ]
机构
[1] Chinese Acad Sci, Inst Opti & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
[2] Chinese Acad Sci, Inst Opt & Elect, Div Frontier Sci & Technol, Chengdu 610209, Peoples R China
[3] Fudan Univ, Key Lab Informat Sci Electromagnet Waves MoE, Shanghai 200433, Peoples R China
[4] Univ Chinese Acad Sci, Sch Optoelect, Beijing 100049, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
VISIBLE WAVELENGTHS; NANOFABRICATION; LITHOGRAPHY; REFLECTION; METALENS; LENSES;
D O I
10.1364/OE.481384
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Phase-gradient metasurfaces are two-dimensional (2D) optical elements that can manipulate light by imposing local, space-variant phase changes on an incident electromagnetic wave. These metasurfaces hold the potential and the promise to revolutionize photonics by providing ultrathin alternatives for a wide range of common optical elements such as bulky refractive optics, waveplates, polarizers, and axicons. However, the fabrication of state-of-the-art metasurfaces typically requires some time-consuming, expensive, and possibly hazardous processing steps. To overcome these limitations on conventional metasurface fabrication, a facile methodology to produce phase-gradient metasurfaces through one-step UV-curable resin printing is developed by our research group. The method dramatically reduces the required processing time and cost, as well as eliminates safety hazards. As a proof-of-concept, the advantages of the method are clearly demonstrated via a rapid reproduction of high-performance metalenses based on the Pancharatnam-Berry phase gradient concept in the visible spectrum. (c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码:8068 / 8080
页数:13
相关论文
共 1 条
  • [1] High-throughput Fabrication of Surface Plasmon Resonance Fiber Probes Using Nanotransfer Printing Method
    Lo, Chien-Fu
    Huang, Nien-Tsu
    Wu, Chien-Lin
    Wang, Lon A.
    2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2017, : 97 - 98