Spectroscopic detection of the gallium methylene (GaCH2 and GaCD2) free radical in the gas phase by laser-induced fluorescence and emission spectroscopy

被引:0
作者
Smith, Tony C. [1 ]
Tarroni, Riccardo [2 ]
Clouthier, Dennis J. [1 ]
机构
[1] Ideal Vacuum Prod LLC, 5910 Midway Pk Blvd NE, Albuquerque, NM 87109 USA
[2] Univ Bologna, Dipartimento Chim Ind Toso Montanari, Viale Risorgimento 4, I-40136 Bologna, Italy
关键词
CORRELATED MOLECULAR CALCULATIONS; COUPLED-CLUSTER METHOD; CONSISTENT BASIS-SETS; GAUSSIAN-BASIS SETS; TRANSITION-PROBABILITIES; VIBRATIONAL-SPECTRA; TRIMETHYL-GALLIUM; ATOMS GALLIUM; GEOMETRY; CONSTANTS;
D O I
10.1063/5.0182504
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
GaCH2, a free radical thought to play a role in the chemical vapor deposition of gallium-containing thin films and semiconductors, has been spectroscopically detected for the first time. The radical was produced in a pulsed discharge jet using a precursor mixture of trimethylgallium vapor in high pressure argon and studied by laser-induced fluorescence and wavelength resolved emission techniques. Partially rotationally resolved spectra of the hydrogenated and deuterated species were obtained, and they exhibit the nuclear statistical weight variations and subband structure expected for a (2)A(2)-B-2(1) electronic transition. The measured spectroscopic quantities have been compared to our own ab initio calculations of the ground and excited state properties. The electronic spectrum of gallium methylene is similar to the corresponding spectrum of the aluminum methylene radical, which we reported in 2022.
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页数:14
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